EP 1606839 A2 20051221 - A METHOD OF PRODUCING SUBSTRATES OR COMPONENTS ON SUBSTRATES INVOLVING TRANSFER OF A USEFUL LAYER, FOR MICROELECTRONICS, OPTOELECTRONICS, OR OPTICS
Title (en)
A METHOD OF PRODUCING SUBSTRATES OR COMPONENTS ON SUBSTRATES INVOLVING TRANSFER OF A USEFUL LAYER, FOR MICROELECTRONICS, OPTOELECTRONICS, OR OPTICS
Title (de)
VERFAHREN ZUR HERSTELLUNG VON SUBSTRATEN ODER BAUELEMENTEN AUF SUBSTRATEN MITTELS ÜBERTRAGUNG EINER NÜTZLICHEN SCHICHT FÜR MIKROELEKTRONIK, OPTOELEKTRONIK ODER OPTIK.
Title (fr)
PROCEDE DE FABRICATION DE SUBSTRATS OU DE COMPOSANTS SUR SUBSTRATS FAISANT INTERVENIR UN TRANSFERT DE COUCHE UTILE, A DES FINS D'APPLICATION EN MICROELECTRONIQUE, OPTOELECTRONIQUE, OU OPTIQUE
Publication
Application
Priority
- IB 2004001344 W 20040312
- FR 0303163 A 20030314
Abstract (en)
[origin: FR2852445A1] Transferring a working layer (14, 16) of monocrystalline material from one support to another comprises: (i) forming a substrate comprising a detachable interface (12) between the working layer and a first support (10), with a ring (161) of material surrounding the interface; (ii) removing the ring to allow a detachment tool to access the interface; (iii) bonding the free surface of the working layer to a second support; and (iv) detaching the working layer at the interface. Independent claims are also included for: (1) a substrate as above in which the support has a peripheral zone that takes the ring of material with it when removed; (2) a substrate as above with a series of channels between the free surface of the working layer and the interface.
IPC 1-7
IPC 8 full level
H01L 21/762 (2006.01); H01L 33/00 (2010.01); H01L 33/32 (2010.01); H01L 21/306 (2006.01); H01L 21/78 (2006.01)
CPC (source: EP KR)
H01L 21/31 (2013.01 - KR); H01L 21/76254 (2013.01 - EP); H01L 21/76259 (2013.01 - EP); H01L 21/30621 (2013.01 - EP); H01L 21/78 (2013.01 - EP)
Citation (search report)
See references of WO 2004081974A2
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PL PT RO SE SI SK TR
DOCDB simple family (publication)
FR 2852445 A1 20040917; FR 2852445 B1 20050520; EP 1606839 A2 20051221; JP 2006520539 A 20060907; JP 4672648 B2 20110420; KR 100801780 B1 20080211; KR 20050111358 A 20051124; TW 200507086 A 20050216; TW I295819 B 20080411; WO 2004081974 A2 20040923; WO 2004081974 A3 20041125
DOCDB simple family (application)
FR 0303163 A 20030314; EP 04720118 A 20040312; IB 2004001344 W 20040312; JP 2006506557 A 20040312; KR 20057017220 A 20050914; TW 93106789 A 20040312