EP 1609164 A4 20101103 - RESISTIVE CANTILEVER SPRING FOR PROBE MICROSCOPY
Title (en)
RESISTIVE CANTILEVER SPRING FOR PROBE MICROSCOPY
Title (de)
RESISTIVE CANTILEVERFEDER FÜR SONDENMIKROSKOPIE
Title (fr)
RESSORT EN PORTE-A-FAUX RESISTIF POUR LA MICROSCOPIE PAR SONDE
Publication
Application
Priority
- IB 0300913 W 20030313
- GB 0302523 A 20030204
- EP 03250876 A 20030213
Abstract (en)
[origin: WO2004070765A1] I A dual- and triple- mode cantilever (10) suitable for simultaneously measuring both normal "adhesion" and lateral "friction" forces independently in three orthogonal directions. The cantilever design allows the measurements to be performed at high sensitivity. The cantilever is useful in Scanning Probe Microscopes "SPM's" and other force-measuring devices, such as the Atomic Force Microscope "AFM", the Friction Force Microscope "FFM", and in probe attachments for the Surface Forces Apparatus "SFA" where both normal and lateral forces acting on a tip need to be accurately and unambiguously measured. The cantilever structure may be used for both resistive and optical detection of tip (13) deflections.
IPC 1-7
IPC 8 full level
G01Q 10/00 (2010.01); G01Q 20/04 (2010.01); G01Q 60/24 (2010.01); G01Q 60/26 (2010.01); G01Q 60/38 (2010.01); H01J 37/00 (2006.01)
CPC (source: EP)
G01Q 20/04 (2013.01); G01Q 60/26 (2013.01); G01Q 60/38 (2013.01)
Citation (search report)
- [X] US 5959200 A 19990928 - CHUI BENJAMIN W [US], et al
- [X] US 2001028033 A1 20011011 - SHIMIZU NOBUHIRO [JP], et al
- [XA] EP 0869329 A2 19981007 - CANON KK [JP]
- See references of WO 2004070765A1
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR
DOCDB simple family (publication)
WO 2004070765 A1 20040819; AU 2003212557 A1 20040830; EP 1609164 A1 20051228; EP 1609164 A4 20101103
DOCDB simple family (application)
IB 0300913 W 20030313; AU 2003212557 A 20030313; EP 03708379 A 20030313