Global Patent Index - EP 1609168 A2

EP 1609168 A2 20051228 - METHOD AND SYSTEM FOR ESTABLISHING THE CLEANLINESS OF A DEVICE

Title (en)

METHOD AND SYSTEM FOR ESTABLISHING THE CLEANLINESS OF A DEVICE

Title (de)

VERFAHREN UND SYSTEM ZUR HERSTELLUNG DER SÄUBERLICHKEIT EINER EINRICHTUNG

Title (fr)

PROCEDE ET SYSTEME PERMETTANT D'ETABLIR LA CLASSE DE PROPRETE D'UN DISPOSITIF

Publication

EP 1609168 A2 20051228 (EN)

Application

EP 04758407 A 20040326

Priority

  • US 2004009325 W 20040326
  • US 40252503 A 20030328

IPC 1-7

H01J 49/40

IPC 8 full level

H01J 49/40 (2006.01)

CPC (source: EP US)

G01N 27/622 (2013.01 - EP US)

Designated contracting state (EPC)

AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PL PT RO SE SI SK TR

DOCDB simple family (publication)

EP 1609168 A2 20051228; EP 1609168 A4 20070725; JP 2006521566 A 20060921

DOCDB simple family (application)

EP 04758407 A 20040326; JP 2006509352 A 20040326