EP 1613203 A4 20091209 - DIGITAL MICROMIRROR DEVICE HAVING A WINDOW TRANSPARENT TO ULTRAVIOLET (UV) LIGHT

Title (en)

DIGITAL MICROMIRROR DEVICE HAVING A WINDOW TRANSPARENT TO ULTRAVIOLET (UV) LIGHT

Title (de)

DIGITALE MIKROSPIEGEL-VORRICHTUNG MIT FÜR ULTRAVIOLETTES (UV) LICHT TRANSPARENTEM FENSTER

Title (fr)

DISPOSITIF DE MICRO-MIROIR NUMERIQUE COMPRENANT UNE FENETRE TRANSPARENTE A LA LUMIERE ULTRAVIOLETTE (UV)

Publication

EP 1613203 A4 20091209 (EN)

Application

EP 04758020 A 20040323

Priority

US 2004008735 W 20040323
US 39566103 A 20030324
US 39566203 A 20030324
US 39566003 A 20030324

Abstract (en)

[origin: WO2004084710A2] A UV-transmissible window assembly for a DMD device includes a UVtransmissible glass window provided in a frame. The window and frame are bonded together to preferably effect a hermetic seal therebetween. Optical coatings specific to the intended wavelength of light transmission are applied to the inner and outer surfaces of the glass window to reduce reflection and increase light transmission therethrough. The window assembly, and DMD provided with the same, is adapted for excellent transmission of ultraviolet light, even at the deep ultraviolet portion of the spectrum. The DMD window assembly has application in the medical arts, both surgery and device manufacture, in the production of integrated circuits (IC), and in other optical lithography applications, among other fields.

IPC 8 full level

G02B 1/02 (2006.01); G02B 26/00 (2006.01); G02B 26/08 (2006.01)

IPC 8 main group level

A61B (2006.01)

CPC (source: EP)

B81B 7/0067 (2013.01); G02B 26/0833 (2013.01); B81B 2201/042 (2013.01)

Citation (search report)

[XY] WO 02100795 A1 20021219 - RAYTHEON CO [US]
[Y] WO 0048046 A1 20000817 - CORNING INC [US]
[Y] US 2002146200 A1 20021010 - KUDRLE THOMAS DAVID [US], et al
[Y] US 2002056560 A1 20020516 - LIU JWEI WIEN [US]
[A] WO 0167977 A1 20010920 - MEMPHIS EYE & CATARACT ASSOCIA [US]
See references of WO 2004084710A2

Designated contracting state (EPC)

AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PL PT RO SE SI SK TR

DOCDB simple family (publication)

WO 2004084710 A2 20041007; WO 2004084710 A3 20060323; CA 2520104 A1 20041007; EP 1613203 A2 20060111; EP 1613203 A4 20091209; JP 2006521580 A 20060921

DOCDB simple family (application)

US 2004008735 W 20040323; CA 2520104 A 20040323; EP 04758020 A 20040323; JP 2006507454 A 20040323