EP 1616345 A2 20060118 - METHOD FOR PRODUCING A TENSIONED LAYER ON A SUBSTRATE, AND A LAYER STRUCTURE
Title (en)
METHOD FOR PRODUCING A TENSIONED LAYER ON A SUBSTRATE, AND A LAYER STRUCTURE
Title (de)
VERFAHREN ZUR HERSTELLUNG EINER VERSPANNTEN SCHICHT AUF EINEM SUBSTRAT UND SCHICHTSTRUKTUR
Title (fr)
PROCEDE DE PRODUCTION D'UNE COUCHE CONTRAINTE SUR UN SUBSTRAT, ET STRUCTURE EN COUCHES
Publication
Application
Priority
- DE 2004000736 W 20040408
- DE 10318283 A 20030422
Abstract (en)
[origin: WO2004095552A2] The invention relates to a method for producing a tensioned layer on a substrate involving the following steps: producing a defect area in a layer adjacent to the layer to be tensioned, and; relaxing at least one layer adjacent to the layer to be tensioned. Additional layers can be epitaxially deposited. Layer structures formed in this manner are advantageously suited for components of all types.
IPC 1-7
IPC 8 full level
H01L 21/20 (2006.01); H01L 21/762 (2006.01)
CPC (source: EP US)
H01L 21/0245 (2013.01 - EP US); H01L 21/02532 (2013.01 - EP US); H01L 21/02664 (2013.01 - EP US); H01L 21/76254 (2013.01 - EP US); H01L 29/7842 (2013.01 - EP US); Y10S 438/938 (2013.01 - EP US)
Citation (search report)
See references of WO 2004095552A2
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PL PT RO SE SI SK TR
DOCDB simple family (publication)
WO 2004095552 A2 20041104; WO 2004095552 A3 20041202; DE 10318283 A1 20041125; EP 1616345 A2 20060118; JP 2006524426 A 20061026; JP 5259954 B2 20130807; US 2006220127 A1 20061005; US 2009298301 A1 20091203; US 7615471 B2 20091110; US 7915148 B2 20110329
DOCDB simple family (application)
DE 2004000736 W 20040408; DE 10318283 A 20030422; EP 04726422 A 20040408; JP 2006504293 A 20040408; US 49667609 A 20090702; US 55407405 A 20051020