EP 1616346 A2 20060118 - METHOD FOR PRODUCING A STRAINED LAYER ON A SUBSTRATE AND CORRESPONDING LAYER STRUCTURE
Title (en)
METHOD FOR PRODUCING A STRAINED LAYER ON A SUBSTRATE AND CORRESPONDING LAYER STRUCTURE
Title (de)
VERFAHREN ZUR HERSTELLUNG EINER VERSPANNTEN SCHICHT AUF EINEM SUBSTRAT UND SCHICHTSTRUKTUR
Title (fr)
PROCEDE POUR PRODUIRE UNE COUCHE CONTRAINTE SUR UN SUBSTRAT ET STRUCTURE EN COUCHES
Publication
Application
Priority
- DE 2004000780 W 20040415
- DE 10318284 A 20030422
Abstract (en)
[origin: WO2004095553A2] The invention relates to a method for producing a layer structure comprising a strained layer on a substrate. The inventive method comprises the steps of producing a defect area in a layer adjoining the layer to be strained, and relaxing at least one layer adjoining the layer to be strained. The defect area is especially produced in the substrate. Additional layers can be epitactically grown. Layer structures so produced are especially suitable for producing various types of components.
IPC 1-7
IPC 8 full level
H01L 21/20 (2006.01); H01L 21/265 (2006.01); H01L 29/10 (2006.01)
CPC (source: EP US)
H01L 21/0245 (2013.01 - EP US); H01L 21/02532 (2013.01 - EP US); H01L 21/02664 (2013.01 - EP US); H01L 21/26506 (2013.01 - EP US); H01L 29/7842 (2013.01 - EP US); H01L 29/1054 (2013.01 - EP US)
Citation (search report)
See references of WO 2004095553A2
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PL PT RO SE SI SK TR
DOCDB simple family (publication)
WO 2004095553 A2 20041104; WO 2004095553 A3 20041223; DE 10318284 A1 20041125; EP 1616346 A2 20060118; JP 2006524427 A 20061026; JP 5065676 B2 20121107; US 2006211221 A1 20060921; US 7416965 B2 20080826
DOCDB simple family (application)
DE 2004000780 W 20040415; DE 10318284 A 20030422; EP 04727506 A 20040415; JP 2006504301 A 20040415; US 55356205 A 20051018