EP 1622743 A2 20060208 - WHOLE-SUBSTRATE SPECTRAL IMAGING SYSTEM FOR CMP
Title (en)
WHOLE-SUBSTRATE SPECTRAL IMAGING SYSTEM FOR CMP
Title (de)
GANZSUBSTRATSPEKTRALABBILDUNGSSYSTEM FÜR CMP
Title (fr)
SYSTEME D'IMAGERIE SPECTRALE DE SUBSTRAT ENTIER POUR PLANARISATION CHIMICO-MECANIQUE (CMP)
Publication
Application
Priority
- US 2004010326 W 20040401
- US 45987603 P 20030401
- US 46944903 P 20030505
Abstract (en)
[origin: WO2004090502A2] Systems of and methods for capturing a plurality of one-dimensional images representative of substantially all of the surface of a substrate within a single revolution of a rotating platen holding a polishing pad in operative contact with the surface of the substrate during chemical-mechanical planarization. A two-dimensional image comprising frame data, which may comprise a spectral image, is derived from the plurality of one-dimensional images. The frame data provides information useful for subsequent chemical-mechanical processing of the substrate.
IPC 1-7
IPC 8 full level
B24B 37/013 (2012.01); B24B 49/12 (2006.01)
CPC (source: EP US)
B24B 37/013 (2013.01 - EP US); B24B 49/12 (2013.01 - EP US)
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PL PT RO SE SI SK TR
DOCDB simple family (publication)
WO 2004090502 A2 20041021; WO 2004090502 A3 20050120; EP 1622743 A2 20060208; EP 1622743 A4 20070404; JP 2006522493 A 20060928; US 2004259472 A1 20041223
DOCDB simple family (application)
US 2004010326 W 20040401; EP 04758852 A 20040401; JP 2006509672 A 20040401; US 81555504 A 20040401