Global Patent Index - EP 1625388 A1

EP 1625388 A1 20060215 - METHOD AND DEVICE FOR OPTICALLY CONTROLLING THE QUALITY OF OBJECTS HAVING A PREFERABLY CIRCULAR EDGE

Title (en)

METHOD AND DEVICE FOR OPTICALLY CONTROLLING THE QUALITY OF OBJECTS HAVING A PREFERABLY CIRCULAR EDGE

Title (de)

VERFAHREN UND VORRICHTUNG ZUR OPTISCHEN QUALITÄTSPRÜFUNG VON OBJEKTEN MIT VOR-ZUGSWEISE KREISFÖRMIG UMLAUFENDEM RAND

Title (fr)

PROCEDE ET DISPOSITIF POUR CONTROLER VISUELLEMENT LA QUALITE D'OBJETS PRESENTANT DE PREFERENCE UN BORD CIRCULAIRE

Publication

EP 1625388 A1 20060215 (DE)

Application

EP 04718904 A 20040310

Priority

  • DE 2004000474 W 20040310
  • DE 10337727 A 20030519
  • DE 10347625 A 20031009
  • DE 10352936 A 20031111

Abstract (en)

[origin: WO2004104566A1] The invention relates to a method and a device for optically controlling the quality of objects having a preferably circular edge. According to the invention, light is oriented towards the edge of the object and the light radiated from the object by reflection, refraction and/or diffraction is detected by means of a measuring device (1). Defects on and/or in the object are determined on the basis of the detected image signals.

IPC 1-7

G01N 21/95; H01L 21/66

IPC 8 full level

G01N 21/95 (2006.01)

CPC (source: EP US)

G01N 21/9503 (2013.01 - EP US)

Citation (examination)

JP 2001134760 A 20010518 - SONY CORP

Designated contracting state (EPC)

DE FR GB

DOCDB simple family (publication)

WO 2004104566 A1 20041202; EP 1625388 A1 20060215; JP 2007501942 A 20070201; US 2006072105 A1 20060406; US 7576849 B2 20090818

DOCDB simple family (application)

DE 2004000474 W 20040310; EP 04718904 A 20040310; JP 2006529567 A 20040310; US 28002205 A 20051116