EP 1625631 A1 20060215 - PULVERIZED ORGANIC SEMICONDUCTORS AND METHOD FOR VAPOR PHASE DEPOSITION ONTO A SUPPORT
Title (en)
PULVERIZED ORGANIC SEMICONDUCTORS AND METHOD FOR VAPOR PHASE DEPOSITION ONTO A SUPPORT
Title (de)
PULVERISIERTE ORGANISCHE HALBLEITER UND VERFAHREN ZUM AUFDAMPFEN AUF EINEN TR GER
Title (fr)
SEMI-CONDUCTEUR ORGANIQUE PULVERISE ET PROCEDE DE DEPOT CHIMIQUE EN PHASE VAPEUR SUR UN SUPPORT
Publication
Application
Priority
- EP 2004004039 W 20040416
- DE 10319742 A 20030430
Abstract (en)
[origin: WO2004097955A1] The invention relates to a method for vapor phase deposition of one or several compounds onto a support by i) introducing the compound into a carrier gas stream in a solid or gaseous state, ii) providing said compound in a gaseous state in the carrier gas stream, iii) condensing the gaseous compound, iv) returning the compound condensed in step (iii) into the gaseous state, and then v) condensing the gaseous compound on the support, the carrier gas stream containing the gaseous compound(s) being cooled to a temperature that lies below the sublimation temperature of said compound(s) by adding a gas stream.
IPC 1-7
IPC 8 full level
C23C 14/12 (2006.01); H01L 51/40 (2006.01); H01L 51/00 (2006.01); H01L 51/30 (2006.01)
CPC (source: EP KR US)
C23C 14/12 (2013.01 - EP KR US); C23C 14/228 (2013.01 - EP US); H05B 33/10 (2013.01 - KR); H10K 30/00 (2023.02 - KR); H10K 71/164 (2023.02 - EP US); H10K 85/311 (2023.02 - EP US); Y02E 10/549 (2013.01 - EP US); Y02P 70/50 (2015.11 - EP US); Y10T 428/265 (2015.01 - EP US)
Citation (search report)
See references of WO 2004097955A1
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PL PT RO SE SI SK TR
DOCDB simple family (publication)
WO 2004097955 A1 20041111; CN 1802759 A 20060712; DE 10319742 A1 20041118; EP 1625631 A1 20060215; JP 2006525422 A 20061109; KR 20060007413 A 20060124; US 2007042178 A1 20070222
DOCDB simple family (application)
EP 2004004039 W 20040416; CN 200480015781 A 20040416; DE 10319742 A 20030430; EP 04727889 A 20040416; JP 2006505162 A 20040416; KR 20057020688 A 20051031; US 55484104 A 20040416