EP 1631983 A1 20060308 - METHOD FOR SIMULTANEOUSLY OBTAINING A PAIR OF SUBSTRATES COVERED BY A USEFUL LAYER
Title (en)
METHOD FOR SIMULTANEOUSLY OBTAINING A PAIR OF SUBSTRATES COVERED BY A USEFUL LAYER
Title (de)
VERFAHREN ZUR GLEICHZEITIGEN HERSTELLUNG EINES MIT EINER NUTZSCHICHT BEDECKTEN SUBSTRATPAARS.
Title (fr)
PROCEDE D'OBTENTION CONCOMITANTE D'UNE PAIRE DE SUBSTRATS RECOUVERTS D'UNE COUCHE UTILE
Publication
Application
Priority
- FR 2004001368 W 20040603
- FR 0306845 A 20030606
Abstract (en)
[origin: US2004248378A1] A method for concurrently producing at least a pair of semiconductor structures that each include at least one useful layer on a substrate. The method includes providing an initial structure that includes a useful layer having a front face on a support substrate. Atomic species are implanted into the useful layer to a controlled mean implantation depth to form a zone of weakness within the useful layer that defines first and second useful layers. Next, a stiffening substrate is bonded to the front face of the initial structure. The first useful layer is then detached from the second useful layer along the zone of weakness to obtain a pair of semiconductor structures with a first structure including the stiffening substrate and the first useful layer and a second structure including the support substrate and the second useful layer. The structures obtained can be used in the fields of electronics, optoelectronics or optics.
IPC 1-7
IPC 8 full level
H01L 21/762 (2006.01)
CPC (source: EP KR US)
H01L 21/265 (2013.01 - KR); H01L 21/76254 (2013.01 - EP US); Y10S 438/977 (2013.01 - EP US)
Citation (search report)
See references of WO 2005004232A1
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PL PT RO SE SI SK TR
DOCDB simple family (publication)
FR 2855909 A1 20041210; FR 2855909 B1 20050826; CN 100358124 C 20071226; CN 1781188 A 20060531; EP 1631983 A1 20060308; JP 2006527478 A 20061130; JP 4625913 B2 20110202; KR 100751150 B1 20070822; KR 20060017615 A 20060224; US 2004248378 A1 20041209; US 2006286770 A1 20061221; US 7115481 B2 20061003; US 7407867 B2 20080805; WO 2005004232 A1 20050113
DOCDB simple family (application)
FR 0306845 A 20030606; CN 200480011824 A 20040603; EP 04767237 A 20040603; FR 2004001368 W 20040603; JP 2006508351 A 20040603; KR 20057022437 A 20051124; US 50904706 A 20060824; US 68608403 A 20031014