EP 1634316 B1 20111123 - A HYBRID MAGNETIC/ELECTROSTATIC DEFLECTOR FOR ION IMPLANTATION SYSTEMS
Title (en)
A HYBRID MAGNETIC/ELECTROSTATIC DEFLECTOR FOR ION IMPLANTATION SYSTEMS
Title (de)
HYBRIDER MAGNETISCHER/ELEKTROSTATISCHER DEFLEKTOR FÜR IONENIMPLANTATIONSSYSTEME
Title (fr)
DEFLECTEUR HYBRIDE MAGNETIQUE/ELECTROSTATIQUE POUR SYSTEMES D'IMPLANTATION IONIQUE
Publication
Application
Priority
- US 2004018788 W 20040614
- US 46170203 A 20030613
Abstract (en)
[origin: US2004227105A1] A magnetic deflector for an ion beam is disclosed and comprises first and second coils. The coils are positioned above and below the beam, respectively, and extend along a width of the beam. Current passes through the coils to generate a magnetic field therebetween that is generally perpendicular to a direction of travel of the beam along substantially the entire width thereof. In another aspect of the invention, a method of deflecting a beam prior to implantation into a workpiece is disclosed. The method includes determining one or more properties associated with the beam and selectively activating one of a magnetic deflection module and an electrostatic deflection module based on the determination.
IPC 8 full level
H01J 37/317 (2006.01); H01J 27/18 (2006.01); H01J 37/00 (2006.01); H01J 37/05 (2006.01); H01J 37/147 (2006.01); H01J 37/30 (2006.01)
CPC (source: EP KR US)
H01J 37/05 (2013.01 - EP US); H01J 37/147 (2013.01 - EP US); H01J 37/30 (2013.01 - KR); H01J 37/3171 (2013.01 - EP US); H01J 2237/057 (2013.01 - EP US)
Designated contracting state (EPC)
DE FR GB IT
DOCDB simple family (publication)
US 2004227105 A1 20041118; US 6881966 B2 20050419; CN 100592459 C 20100224; CN 101777481 A 20100714; CN 101777481 B 20120627; CN 1806309 A 20060719; EP 1634316 A2 20060315; EP 1634316 B1 20111123; JP 2007517358 A 20070628; JP 2009117393 A 20090528; JP 4645965 B2 20110309; JP 4650748 B2 20110316; KR 101157676 B1 20120703; KR 20060018240 A 20060228; TW 200503042 A 20050116; TW I314337 B 20090901; WO 2004114354 A2 20041229; WO 2004114354 A3 20050317
DOCDB simple family (application)
US 46170203 A 20030613; CN 200480016510 A 20040614; CN 200910266872 A 20040614; EP 04755134 A 20040614; JP 2006533770 A 20040614; JP 2009046436 A 20090227; KR 20057023293 A 20040614; TW 93116808 A 20040611; US 2004018788 W 20040614