EP 1636628 A1 20060322 - HIGH FILL RATIO REFLECTIVE SPATIAL LIGHT MODULATOR WITH HIDDEN HINGE
Title (en)
HIGH FILL RATIO REFLECTIVE SPATIAL LIGHT MODULATOR WITH HIDDEN HINGE
Title (de)
REFLEKTIVER RAUM-LICHTMODULATOR MIT HOHEM FÜLLVERHÄLTNIS MIT VERBORGENEM SCHWENKGLIED
Title (fr)
MODULATEUR SPATIAL DE LUMIERE REFLECTIF A TAUX DE REMPLISSAGE ELEVE COMPRENANT UNE CHARNIERE DISSIMULEE
Publication
Application
Priority
- US 2004004279 W 20040212
- US 47540403 P 20030602
- US 61112103 A 20030630
Abstract (en)
[origin: WO2004109363A1] A micro mirror array having a hidden hinge that is useful, for example, in a reflective spatial light modulator. In one embodiment, the micro mirror array includes spacer support walls, a hinge, a mirror plate and a reflective surface on the upper surface of the mirror plate, the reflective surface concealing the hinge and the mirror plate. The micro mirror array fabricated from a single material.
IPC 1-7
IPC 8 full level
G02B 26/08 (2006.01)
CPC (source: EP KR)
B81B 7/02 (2013.01 - KR); G02B 26/02 (2013.01 - KR); G02B 26/0841 (2013.01 - EP KR); B81B 2201/04 (2013.01 - KR)
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR
DOCDB simple family (publication)
WO 2004109363 A1 20041216; EP 1636628 A1 20060322; EP 1636628 A4 20090415; JP 2006526805 A 20061124; KR 20060014434 A 20060215; TW 200528752 A 20050901; TW 201144860 A 20111216; TW I363882 B 20120511; TW I467231 B 20150101
DOCDB simple family (application)
US 2004004279 W 20040212; EP 04710674 A 20040212; JP 2006508734 A 20040212; KR 20057023135 A 20051202; TW 100124813 A 20040602; TW 93115857 A 20040602