EP 1644557 B1 20101110 - ELECTROCHEMICAL PROCESSING CELL
Title (en)
ELECTROCHEMICAL PROCESSING CELL
Title (de)
ELEKTROCHEMISCHE VERARBEITUNGSZELLE
Title (fr)
CELLULE DE TRAITEMENT ELECTROCHIMIQUE
Publication
Application
Priority
- US 2004022183 W 20040708
- US 61604403 A 20030708
- US 62733603 A 20030724
Abstract (en)
[origin: WO2005007933A1] Embodiments of the invention provide an electrochemical plating cell (100). The plating cell includes a fluid basin (101), (102) having an anolyte solution compartment and a catholyte solution compartment, an ionic membrane (112) positioned between the anolyte solution compartment and the catholyte solution compartment, and an anode positioned in the anolyte solution compartment, wherein the ionic membrane comprises a poly tetrafluoroethylene based ionomer.
IPC 8 full level
C25B 9/19 (2021.01); C25B 13/08 (2006.01); C25D 3/38 (2006.01); C25D 7/12 (2006.01); C25D 17/00 (2006.01); C25D 21/00 (2006.01); H01L 21/00 (2006.01)
CPC (source: EP)
C25D 3/38 (2013.01); C25D 7/123 (2013.01); C25D 17/001 (2013.01); C25D 17/002 (2013.01)
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PL PT RO SE SI SK TR
DOCDB simple family (publication)
WO 2005007933 A1 20050127; AT E487811 T1 20101115; CN 1816650 A 20060809; EP 1644557 A1 20060412; EP 1644557 B1 20101110; JP 2007523996 A 20070823; JP 4448133 B2 20100407; TW 200514873 A 20050501
DOCDB simple family (application)
US 2004022183 W 20040708; AT 04756864 T 20040708; CN 200480019317 A 20040708; EP 04756864 A 20040708; JP 2006518950 A 20040708; TW 93120480 A 20040708