EP 1647060 A1 20060419 - ETCHING METHOD FOR MAKING CHALCOGENIDE MEMORY ELEMENTS
Title (en)
ETCHING METHOD FOR MAKING CHALCOGENIDE MEMORY ELEMENTS
Title (de)
ÄTZVERFAHREN ZUR HERSTELLUNG VON CHALKOGENID-SPEICHERELEMENTEN
Title (fr)
PROCEDE DE GRAVURE POUR PRODUIRE DES ELEMENTS DE MEMOIRE A CHALCOGENURE
Publication
Application
Priority
- US 2004023497 W 20040720
- US 48892103 P 20030721
IPC 1-7
Citation (search report)
See references of WO 2005011011A1
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PL PT RO SE SI SK TR
DOCDB simple family (publication)
DOCDB simple family (application)
CN 200480021249 A 20040720; EP 04757192 A 20040720