EP 1649241 A1 20060426 - METHOD FOR CALIBRATING AN INTERFEROMETER, METHOD FOR QUALIFYING AN OBJECT, AND METHOD FOR PRODUCING AN OBJECT
Title (en)
METHOD FOR CALIBRATING AN INTERFEROMETER, METHOD FOR QUALIFYING AN OBJECT, AND METHOD FOR PRODUCING AN OBJECT
Title (de)
VERFAHREN ZUM KALIBRIEREN EINES INTERFEROMETERS, VERFAHREN ZUM QUALIFIZIEREN EINES OBJEKTS UND VERFAHREN ZUM HERSTELLEN EINES OBJEKTS
Title (fr)
PROCEDE POUR CALIBRER UN INTERFEROMETRE, PROCEDE POUR QUALIFIER UN OBJET ET PROCEDE POUR PRODUIRE UN OBJET
Publication
Application
Priority
EP 0213091 W 20021121
Abstract (en)
[origin: WO2004046641A1] The invention relates to a method for calibrating an interferometer comprising a compensation system for measuring an aspherical surface. Said method consists of the following steps: the interferometer (1) comprising the compensation system (25) is prepared; a reference optical module (29) comprising a mirror (37) having a pre-determined mirror face and a pre-determined diffraction pattern (39) separate from the mirror face (37) is arranged; the retracing wave fronts are superimposed, after having passed through the compensation system (25), by a reference wave front to an interference pattern; and optical properties of the interferometer (1) and the compensation system (25) are determined from the interference pattern.
IPC 1-7
IPC 8 full level
G01B 9/02 (2006.01); G01M 11/00 (2006.01)
CPC (source: EP US)
G01B 9/02039 (2013.01 - EP US); G01B 9/02072 (2013.06 - EP US); G01M 11/005 (2013.01 - EP US)
Citation (search report)
See references of WO 2004046641A1
Designated contracting state (EPC)
DE NL
DOCDB simple family (publication)
WO 2004046641 A1 20040603; AU 2002358025 A1 20040615; EP 1649241 A1 20060426; US 2005275849 A1 20051215
DOCDB simple family (application)
EP 0213091 W 20021121; AU 2002358025 A 20021121; EP 02791696 A 20021121; US 13332905 A 20050520