EP 1649509 A2 20060426 - PRODUCTION OF A STRUCTURE COMPRISING A PROTECTIVE LAYER AGAINST CHEMICAL TREATMENT
Title (en)
PRODUCTION OF A STRUCTURE COMPRISING A PROTECTIVE LAYER AGAINST CHEMICAL TREATMENT
Title (de)
HERSTELLUNG EINER STRUKTUR MIT EINER VOR CHEMISCHER BEHANDLUNG SCHÜTZENDEN SCHICHT
Title (fr)
REALISATION D'UNE STRUCTURE COMPRENANT UNE COUCHE PROTEGEANT CONTRE DES TRAITEMENTS CHIMIQUES
Publication
Application
Priority
- FR 2004002040 W 20040729
- FR 0309380 A 20030730
Abstract (en)
[origin: US2005026391A1] A preventive treatment method for a multilayer semiconductor structure having a support substrate, at least one intermediate layer and a surface layer in which the surface layer is to be subjected to a subsequent chemical treatment. The method includes forming a protective layer between the intermediate layer and the surface layer. The protective layer is made from a material chosen to be sufficiently resistant to the chemical treatment to protect the intermediate layer from chemical attack.
IPC 1-7
IPC 8 full level
H01L 21/20 (2006.01); H01L 21/762 (2006.01)
CPC (source: EP KR US)
H01L 21/76254 (2013.01 - EP US); H01L 21/76259 (2013.01 - EP US); H01L 27/12 (2013.01 - KR)
Citation (search report)
See references of WO 2005013338A2
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PL PT RO SE SI SK TR
DOCDB simple family (publication)
FR 2858461 A1 20050204; FR 2858461 B1 20051104; CN 100401499 C 20080709; CN 1833315 A 20060913; EP 1649509 A2 20060426; JP 2007500436 A 20070111; KR 100751619 B1 20070822; KR 20060033917 A 20060420; US 2005026391 A1 20050203; US 7169683 B2 20070130; WO 2005013338 A2 20050210; WO 2005013338 A3 20050630
DOCDB simple family (application)
FR 0309380 A 20030730; CN 200480022339 A 20040729; EP 04767815 A 20040729; FR 2004002040 W 20040729; JP 2006521625 A 20040729; KR 20067001850 A 20060126; US 68608203 A 20031014