Global Patent Index - EP 1654394 A2

EP 1654394 A2 20060510 - HIGH PEAK POWER PLASMA PULSED SUPPLY WITH ARC HANDLING

Title (en)

HIGH PEAK POWER PLASMA PULSED SUPPLY WITH ARC HANDLING

Title (de)

GEPULSTE PLASMAENERGIEVERSORGUNG MIT HOHER SPITZENLEISTUNG MIT LICHTBOGENHANDHABUNG

Title (fr)

ALIMENTATION PULSEE POUR PLASMA A PUISSANCE DE CRETE ELEVEE AVEC GESTION D'ARC

Publication

EP 1654394 A2 20060510 (EN)

Application

EP 04778755 A 20040720

Priority

  • US 2004023402 W 20040720
  • US 62633003 A 20030724

IPC 1-7

C23C 14/00

Citation (search report)

See references of WO 2005010228A2

Designated contracting state (EPC)

AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PL PT RO SE SI SK TR

DOCDB simple family (publication)

EP 1654394 A2 20060510; JP 2006528731 A 20061221

DOCDB simple family (application)

EP 04778755 A 20040720; JP 2006521202 A 20040720