EP 1654397 A1 20060510 - METHOD AND DEVICE FOR COATING OR MODIFYING SURFACES
Title (en)
METHOD AND DEVICE FOR COATING OR MODIFYING SURFACES
Title (de)
VERFAHREN UND VORRICHTUNG ZUR BESCHICHTUNG ODER MODIFIZIERUNG VON OBERFLÄCHEN
Title (fr)
PROCEDE ET DISPOSITIF DE REVETEMENT OU DE MODIFICATION DE SURFACES
Publication
Application
Priority
- EP 2004051659 W 20040729
- DE 10335470 A 20030802
Abstract (en)
[origin: US7410669B2] In a process according to the invention and an apparatus according to the invention for the coating or modification of a surface a flow of a first gaseous phase or of a first aerosol comprising one or more precursor compounds is guided along a heated filament so that the precursor compounds are converted into reactive compounds. Alternatively, non-activated particles are guided along a heated filament so that these are activated and are then combined with a gaseous phase or an aerosol comprising a plurality of precursor compounds, so that the precursor compounds are thereby converted into reactive compounds. The reactive compounds formed according to at least one of the two aforementioned steps are guided onto a substrate that is exposed to atmospheric pressure, so that a layer is deposited on the substrate or its surface is modified.
IPC 1-7
IPC 8 full level
C23C 16/44 (2006.01); C23C 16/452 (2006.01); C23C 16/455 (2006.01)
CPC (source: EP KR US)
C23C 16/44 (2013.01 - EP KR US); C23C 16/452 (2013.01 - EP US); C23C 16/453 (2013.01 - KR); C23C 16/455 (2013.01 - EP KR US)
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PL PT RO SE SI SK TR
DOCDB simple family (publication)
US 2006127574 A1 20060615; US 7410669 B2 20080812; AT E460509 T1 20100315; CN 1833051 A 20060913; CN 1833051 B 20101222; DE 10335470 A1 20050224; DE 502004010882 D1 20100422; EP 1654397 A1 20060510; EP 1654397 B1 20100310; KR 20060059997 A 20060602; WO 2005014880 A1 20050217
DOCDB simple family (application)
US 34460906 A 20060201; AT 04766367 T 20040729; CN 200480022357 A 20040729; DE 10335470 A 20030802; DE 502004010882 T 20040729; EP 04766367 A 20040729; EP 2004051659 W 20040729; KR 20067002282 A 20060202