EP 1654914 B1 20090325 - EXTREME UV AND SOFT X RAY GENERATOR
Title (en)
EXTREME UV AND SOFT X RAY GENERATOR
Title (de)
VORRICHTUNG ZUR ERZEUGUNG VON EUV- UND WEICHER RÖNTGENSTRAHLUNG
Title (fr)
GENERATEUR DE RAYONS ULTRAVIOLETS EXTREMES ET DE RAYONS X MOUS
Publication
Application
Priority
- IB 2004051323 W 20040729
- DE 10336273 A 20030807
Abstract (en)
[origin: WO2005015602A2] In a gas discharge source, in particular for generating extreme ultraviolet and/or soft X rays, a gas-filled chamber (3) is arranged between two electrodes (1, 2) and houses devices for letting in and pumping away gas, and an electrode (1) has a radiation exit opening (5) that defines an axis of symmetry (4). The improvements proposed consist in the arrangement of a diaphragm (6) between the two electrodes (1, 2), the diaphragm (6) working as a differential pumping stage and having at least one opening (7) located on the axis of symmetry (4).
IPC 8 full level
H05G 2/00 (2006.01)
CPC (source: EP KR US)
H01J 61/00 (2013.01 - KR); H05G 2/00 (2013.01 - KR); H05G 2/003 (2013.01 - EP US)
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PL PT RO SE SI SK TR
DOCDB simple family (publication)
WO 2005015602 A2 20050217; WO 2005015602 A3 20050602; AT E427026 T1 20090415; CN 100482030 C 20090422; CN 1833472 A 20060913; DE 10336273 A1 20050310; DE 502004009224 D1 20090507; EP 1654914 A2 20060510; EP 1654914 B1 20090325; EP 1654914 B8 20090812; JP 2007501997 A 20070201; JP 4814093 B2 20111109; KR 101058068 B1 20110822; KR 20060054422 A 20060522; TW 200515458 A 20050501; US 2008143228 A1 20080619; US 7734014 B2 20100608
DOCDB simple family (application)
IB 2004051323 W 20040729; AT 04744676 T 20040729; CN 200480022673 A 20040729; DE 10336273 A 20030807; DE 502004009224 T 20040729; EP 04744676 A 20040729; JP 2006522465 A 20040729; KR 20067002392 A 20040729; TW 93123359 A 20040804; US 56703804 A 20040729