EP 1656524 A1 20060517 - Method of control of a vacuum device and vacuum device
Title (en)
Method of control of a vacuum device and vacuum device
Title (de)
Verfahren zur Steuerung einer Vakuumvorrichtung und Vakuumvorrichtung
Title (fr)
Procédé de contrôle d'un dispositif à vide et dispositif à vide
Publication
Application
Priority
- EP 2004007764 W 20040714
- US 49699803 P 20030820
Abstract (en)
[origin: WO2005019745A1] The invention relates to a vacuum device comprising several cryopumps (10), in particular several cryopumps connected in parallel. In addition, the device is equipped with at least one compressor unit (16), which is connected to the cryopumps (10) via medium supply lines (12). A medium return line (14) is likewise connected to the compressor unit (16) and the cryopumps (10). A reservoir (20) for the medium is positioned between the medium supply line (12) and the medium return line (14). A pressure gauge (30), which is connected to a supply valve (26) by means of a control unit (32), is also located in the medium supply line. To maintain the pressure differential in the cryopumps (10) at a level that is as constant as possible, the supply valve (26) is opened if the pressure in the medium supply line (12) exceeds a threshold value, thus allowing the medium to flow into the reservoir (20).
IPC 1-7
IPC 8 full level
B01D 8/00 (2006.01); F04B 37/08 (2006.01); F25B 9/14 (2006.01)
CPC (source: EP KR US)
B01D 8/00 (2013.01 - EP US); F04B 37/08 (2013.01 - EP US); F25B 9/14 (2013.01 - EP KR US); F25B 2309/002 (2013.01 - EP US); F25B 2309/1428 (2013.01 - EP US); F25B 2400/075 (2013.01 - EP US); F25B 2600/2523 (2013.01 - EP US); F25B 2700/1931 (2013.01 - EP US); F25B 2700/1933 (2013.01 - EP US)
Citation (search report)
See references of WO 2005019745A1
Designated contracting state (EPC)
DE FR GB IT
DOCDB simple family (publication)
WO 2005019745 A1 20050303; CN 1839285 A 20060927; EP 1656524 A1 20060517; JP 2007502960 A 20070215; JP 4638871 B2 20110223; KR 20060066103 A 20060615; TW 200510636 A 20050316; US 2006254289 A1 20061116
DOCDB simple family (application)
EP 2004007764 W 20040714; CN 200480023891 A 20040714; EP 04740983 A 20040714; JP 2006523540 A 20040714; KR 20067003343 A 20060217; TW 93125053 A 20040820; US 56856506 A 20060217