EP 1656688 A2 20060517 - METHOD AND APPARATUS FOR PLASMA GENERATION
Title (en)
METHOD AND APPARATUS FOR PLASMA GENERATION
Title (de)
VERFAHREN UND VORRICHTUNG ZUR PLASMAERZEUGUNG
Title (fr)
PROCEDE ET APPAREIL DE GENERATION DE PLASMA
Publication
Application
Priority
- US 2004023217 W 20040719
- US 48801903 P 20030717
- US 49809303 P 20030827
- US 49816303 P 20030827
- US 51836703 P 20031108
Abstract (en)
[origin: WO2005017943A2] An RF-driven plasma source, including a pair of spaced-apart plasma electrodes, wherein the electrodes act as plates of a capacitor, the gas electrically discharges and creates a plasma of both positive and negative ions, in a clean process that enables efficient sample analysis, with preferred isolated sample photo-ionization, reduced-power operation and also including signal detection with modulated drive electronics.
IPC 1-7
H01J 49/10; H01J 49/40; H01J 49/16; H01J 27/24; H01J 61/68; H01J 61/90; H01J 49/42
IPC 8 full level
H01J 27/24 (2006.01); H01J 49/10 (2006.01); H01J 49/16 (2006.01); H01J 49/40 (2006.01); H01J 49/42 (2006.01); H01J 61/68 (2006.01); H01J 61/90 (2006.01)
CPC (source: EP)
H01J 27/16 (2013.01)
Citation (search report)
See references of WO 2005017943A2
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PL PT RO SE SI SK TR
DOCDB simple family (publication)
WO 2005017943 A2 20050224; WO 2005017943 A3 20050804; EP 1656688 A2 20060517
DOCDB simple family (application)
US 2004023217 W 20040719; EP 04778627 A 20040719