EP 1661154 A2 20060531 - PARTICLE OPTICAL APPARATUS
Title (en)
PARTICLE OPTICAL APPARATUS
Title (de)
TEILCHEN-OPTISCHE VORRICHTUNG
Title (fr)
APPAREIL OPTIQUE POUR PARTICULES
Publication
Application
Priority
- GB 2004003637 W 20040825
- GB 0320187 A 20030828
Abstract (en)
[origin: WO2005022581A2] A particle optical apparatus including an aperture plate for shaping a particle beam before the particle beam enters a monochromator filter assembly. The aperture plate has at least one aperture and is adjustable with respect to the monochromator filter assembly, in normal operating conditions, so that the size of the aperture used to shape the particle beam can be varied, and therefore the beam current entering the filter assembly can be varied.
IPC 1-7
IPC 8 full level
H01J 37/05 (2006.01); H01J 37/09 (2006.01); H01J 37/26 (2006.01)
CPC (source: EP US)
H01J 37/05 (2013.01 - EP US); H01J 37/09 (2013.01 - EP US); H01J 37/263 (2013.01 - EP US); H01J 2237/045 (2013.01 - EP US); H01J 2237/0453 (2013.01 - EP US); H01J 2237/0455 (2013.01 - EP US); H01J 2237/0456 (2013.01 - EP US); H01J 2237/0458 (2013.01 - EP US)
Citation (search report)
See references of WO 2005022581A2
Designated contracting state (EPC)
DE FR GB
DOCDB simple family (publication)
WO 2005022581 A2 20050310; WO 2005022581 A3 20050602; EP 1661154 A2 20060531; GB 0320187 D0 20031001; JP 2007504606 A 20070301; JP 4523594 B2 20100811; US 2007138403 A1 20070621
DOCDB simple family (application)
GB 2004003637 W 20040825; EP 04768193 A 20040825; GB 0320187 A 20030828; JP 2006524417 A 20040825; US 56996304 A 20040802