EP 1661245 A2 20060531 - SHELL TYPE ACTUATOR
Title (en)
SHELL TYPE ACTUATOR
Title (de)
STELLGLIED DES SCHALENTYPS
Title (fr)
ACTIONNEUR DE TYPE COQUILLE
Publication
Application
Priority
- US 2004027162 W 20040820
- US 49643103 P 20030820
- US 49642103 P 20030820
- US 49643003 P 20030820
Abstract (en)
[origin: WO2005020434A2] A micromechanical resonator (400, 1125) is formed on a substrate (120). The resonator has a partial spherical shell (110) clamped on an outside portion of the shell to the substrate. In other embodiments, a flat disc or other shape may be used. Movement is induced in a selected portion of the disc, inducing easily detectable out-of-plane motion. A laser (1110) is used in one embodiment to heat the selected portion of the disc and induce the motion. The motion may be detected by capacitive or interferometric techniques.
IPC 1-7
IPC 8 full level
B81B 3/00 (2006.01); H03C 1/46 (2006.01); H03D 1/00 (2006.01); H03D 3/34 (2006.01); H03H 3/007 (2006.01); H03H 9/24 (2006.01); H03H 11/10 (2006.01); H10N 30/80 (2023.01)
CPC (source: EP US)
G02B 26/0858 (2013.01 - EP US); H03C 1/46 (2013.01 - EP US); H03D 1/00 (2013.01 - EP US); H03D 1/02 (2013.01 - EP US); H03D 3/34 (2013.01 - EP US); H03H 3/0072 (2013.01 - EP US); H03H 9/02259 (2013.01 - EP US); H03H 9/2405 (2013.01 - EP US); H03H 9/2436 (2013.01 - EP US); H03B 5/30 (2013.01 - EP US); H03H 2009/02488 (2013.01 - EP US); H03H 2009/02511 (2013.01 - EP US)
Citation (examination)
AUBIN K L; ET AL: "Laser annealing for high-Q MEMS resonators", PROCEEDINGS OF THE SPIE, vol. 5116, 30 April 2003 (2003-04-30), Bellingham, VA, US, pages 531 - 535
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PL PT RO SE SI SK TR
DOCDB simple family (publication)
WO 2005020434 A2 20050303; WO 2005020434 A3 20050506; CN 101015120 A 20070808; CN 101015120 B 20101222; CN 1951007 A 20070418; EP 1661240 A2 20060531; EP 1661240 B1 20130102; EP 1661245 A2 20060531; US 2006238239 A1 20061026; US 2006239635 A1 20061026; US 2007109656 A1 20070517; US 2012058741 A1 20120308; US 7812502 B2 20101012; US 8072117 B2 20111206; US 8330323 B2 20121211; WO 2005020482 A2 20050303; WO 2005020482 A3 20050623; WO 2005035436 A2 20050421; WO 2005035436 A3 20051110
DOCDB simple family (application)
US 2004027162 W 20040820; CN 200480030759 A 20040820; CN 200480030868 A 20040820; EP 04786550 A 20040820; EP 04786553 A 20040820; US 2004027226 W 20040820; US 2004027229 W 20040820; US 201113292658 A 20111109; US 35829906 A 20060220; US 35868906 A 20060220; US 35891706 A 20060220