EP 1662246 A1 20060531 - PROBE REPLACING METHOD FOR SCANNING PROBE MICROSCOPE
Title (en)
PROBE REPLACING METHOD FOR SCANNING PROBE MICROSCOPE
Title (de)
SONDENAUSTAUSCHVERFAHREN FÜR DAS RASTERSONDENMIKROSKOP
Title (fr)
PROCEDE DE REMPLACEMENT DE SONDE POUR MICROSCOPE-SONDE A BALAYAGE
Publication
Application
Priority
- JP 2004003851 W 20040322
- JP 2003200676 A 20030723
Abstract (en)
A probe replacement method for a scanning probe microscope for measuring the surface of a sample, having a cantilever (21) having a probe (20), and a measurement unit for measuring a physical quantity between the probe and sample. The scanning probe microscope is provided with a cantilever mount (22), a cantilever cassette (30), an XY stage (14) and Z stage (15) for moving the cantilever cassette, and an optical microscope (18). The method has a first step for performing alignment between the cantilever mount and the cantilever cassette, selecting a cantilever from the cantilever cassette, and mounting the cantilever thus selected on the cantilever mount; and a second step for moving an optical microscope and setting the mounted cantilever in a prescribed position in the field of view after the cantilever is mounted in the scanning probe microscope. In the second step, a step is provided for moving the optical microscope side or the cantilever side and performing positional adjustment.
IPC 1-7
IPC 8 full level
G01Q 10/06 (2010.01); G01Q 30/06 (2010.01); G01Q 70/00 (2010.01); G12B 21/22 (2006.01)
CPC (source: EP KR US)
B82Y 35/00 (2013.01 - US); G01Q 10/06 (2013.01 - EP KR US); G01Q 30/06 (2013.01 - EP KR US); G01Q 70/00 (2013.01 - KR); G01Q 70/02 (2013.01 - EP US)
Citation (search report)
See references of WO 2005010502A1
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PL PT RO SE SI SK TR
DOCDB simple family (publication)
EP 1662246 A1 20060531; JP WO2005010502 A1 20060928; KR 100841031 B1 20080624; KR 20060031694 A 20060412; US 2007180889 A1 20070809; WO 2005010502 A1 20050203
DOCDB simple family (application)
EP 04722442 A 20040322; JP 2004003851 W 20040322; JP 2005511974 A 20040322; KR 20067001387 A 20060120; US 56550904 A 20040322