EP 1664932 A2 20060607 - INTERFEROMETRIC ANALYSIS OF SURFACES
Title (en)
INTERFEROMETRIC ANALYSIS OF SURFACES
Title (de)
INTERFEROMETRISCHE ANALYSE VON OBERFLÄCHEN
Title (fr)
PROCEDES ET SYSTEMES D'ANALYSE INTERFEROMETRIQUE DE SURFACES ET APPLICATIONS ASSOCIEES
Publication
Application
Priority
- US 2004030196 W 20040915
- US 50293203 P 20030915
- US 50293303 P 20030915
- US 50290703 P 20030915
- US 50293003 P 20030915
- US 53943704 P 20040126
Abstract (en)
[origin: EP2275868A1] A method for determining a spatial property of an object includes obtaining a scanning low coherence interference signal from a measurement object that includes two or more interfaces. The scanning low coherence interference signal includes two or more overlapping low coherence interference signals, each of which results from a respective interface. Based on the low coherence interference signal, a spatial property of at least one of the interfaces is determined. In some cases, the determination is based on a subset of the low coherence interference signal rather than on the entirety of the signal. Alternatively, or in addition, the determination can be based on a template, which may be indicative of an instrument response of the interferometer used to obtain the low coherence interference signal.
IPC 1-7
IPC 8 full level
G01B 9/02 (2006.01); G01B 11/00 (2006.01); G01B 11/06 (2006.01); G03F 7/20 (2006.01); G03F 9/00 (2006.01)
CPC (source: EP KR US)
G01B 9/02 (2013.01 - KR); G01B 9/02019 (2013.01 - EP US); G01B 9/02022 (2013.01 - EP US); G01B 9/02084 (2013.01 - EP US); G01B 9/02087 (2013.01 - EP US); G01B 9/0209 (2013.01 - EP US); G01B 11/0675 (2013.01 - EP US); G03F 7/00 (2013.01 - KR); G03F 7/20 (2013.01 - KR); G03F 7/70491 (2013.01 - EP US); G03F 7/70608 (2013.01 - EP US); G03F 7/70641 (2013.01 - EP US); G03F 7/70775 (2013.01 - EP US); G03F 9/7003 (2013.01 - EP US); G03F 9/7049 (2013.01 - EP US); G03F 9/7088 (2013.01 - EP US); G01B 2290/30 (2013.01 - EP US); G01B 2290/70 (2013.01 - EP US)
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PL PT RO SE SI SK TR
DOCDB simple family (publication)
EP 2275868 A1 20110119; EP 2275868 B1 20180228; AT E421716 T1 20090215; DE 602004019231 D1 20090312; EP 1664931 A2 20060607; EP 1664931 B1 20090121; EP 1664932 A2 20060607; EP 1664932 B1 20150128; JP 2007506070 A 20070315; JP 2007506071 A 20070315; JP 2011221027 A 20111104; JP 5340539 B2 20131113; JP 5587241 B2 20140910; KR 101185473 B1 20121002; KR 101295207 B1 20130809; KR 20060084852 A 20060725; KR 20060096054 A 20060905; KR 20120040260 A 20120426; TW 200517638 A 20050601; TW 200526925 A 20050816; TW 200527145 A 20050816; TW 200528686 A 20050901; TW I331210 B 20101001; TW I331211 B 20101001; TW I334921 B 20101221; TW I358614 B 20120221; US 2005057757 A1 20050317; US 2005068540 A1 20050331; US 2005078318 A1 20050414; US 2005078319 A1 20050414; US 2008068614 A1 20080320; US 2009096980 A1 20090416; US 2010060898 A1 20100311; US 7289224 B2 20071030; US 7289225 B2 20071030; US 7292346 B2 20071106; US 7298494 B2 20071120; US 7456975 B2 20081125; US 7586620 B2 20090908; US 8107085 B2 20120131; WO 2005029192 A2 20050331; WO 2005029192 A3 20050929; WO 2005029193 A2 20050331; WO 2005029193 A3 20051006
DOCDB simple family (application)
EP 10177299 A 20040915; AT 04784044 T 20040915; DE 602004019231 T 20040915; EP 04784044 A 20040915; EP 04788766 A 20040915; JP 2006526408 A 20040915; JP 2006526427 A 20040915; JP 2011099328 A 20110427; KR 20067005257 A 20060315; KR 20067007376 A 20040915; KR 20127005506 A 20040915; TW 93127841 A 20040915; TW 93127842 A 20040915; TW 93127843 A 20040915; TW 93127851 A 20040915; US 2004030051 W 20040915; US 2004030196 W 20040915; US 26237508 A 20081031; US 55245209 A 20090902; US 94162204 A 20040915; US 94163104 A 20040915; US 94164904 A 20040915; US 94165104 A 20040915; US 94216607 A 20071119