Global Patent Index - EP 1669609 A1

EP 1669609 A1 20060614 - Gas partial pressure control for process optimisation

Title (en)

Gas partial pressure control for process optimisation

Title (de)

Partialdruckregelung von Gas zur Optimierung eines Verfahrens

Title (fr)

Contrôle des pressions partielles de gaz pour optimisation de procédé

Publication

EP 1669609 A1 20060614 (FR)

Application

EP 05300948 A 20051118

Priority

FR 0452853 A 20041203

Abstract (en)

A main regulation valve (24) controls total pressure of gas mixture in the vacuum enclosure (8) as a function of total pressure set point. An auxiliary regulation valve (29) held below a secondary pump (9), is controlled as a function of delivery pressure set point to modify delivery pressure of the pump and to adapt its pumping capacity selectively for adjusting the proportions of gases in mixture of the enclosure. An independent claim is also included for the controlling method of low pressure gas mixture in vacuum enclosure.

IPC 8 full level

F04D 19/04 (2006.01); F04D 27/00 (2006.01)

CPC (source: EP US)

F04D 19/04 (2013.01 - EP US); F04D 27/00 (2013.01 - EP US); Y10T 137/0396 (2015.04 - EP US); Y10T 137/86002 (2015.04 - EP US); Y10T 137/86083 (2015.04 - EP US); Y10T 137/86139 (2015.04 - EP US); Y10T 137/87917 (2015.04 - EP US)

Citation (search report)

Designated contracting state (EPC)

AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR

DOCDB simple family (publication)

EP 1669609 A1 20060614; EP 1669609 B1 20080206; AT E385545 T1 20080215; DE 602005004640 D1 20080320; DE 602005004640 T2 20090129; FR 2878913 A1 20060609; FR 2878913 B1 20070119; US 2006118178 A1 20060608; US 2011005607 A1 20110113; US 7793685 B2 20100914; US 8297311 B2 20121030; WO 2006059027 A1 20060608

DOCDB simple family (application)

EP 05300948 A 20051118; AT 05300948 T 20051118; DE 602005004640 T 20051118; FR 0452853 A 20041203; FR 2005050966 W 20051118; US 29196205 A 20051202; US 80496710 A 20100803