EP 1676294 A2 20060705 - THERMAL PROCESSING SYSTEM WITH CROSS FLOW INJECTION SYSTEM WITH ROTATABLE INJECTORS
Title (en)
THERMAL PROCESSING SYSTEM WITH CROSS FLOW INJECTION SYSTEM WITH ROTATABLE INJECTORS
Title (de)
THERMISCHES VERARBEITUNGSSYSTEM MIT QUERFLUSS-INJEKTIONSSYSTEM MIT DREHBAREN INJEKTOREN
Title (fr)
SYSTEME DE TRAITEMENT THERMIQUE A SYSTEME D'INJECTION A DEBIT TRANSVERSAL A INJECTEURS ROTATIFS
Publication
Application
Priority
- US 2004031063 W 20040922
- US 50635403 P 20030925
- US 94684904 A 20040921
Abstract (en)
[origin: WO2005031803A2] An apparatus is provided for thermally processing substrates held in a carrier. The apparatus includes an injection system which provides for selectable injection of gases to the process chamber. The injection system comprises one or more elongated injection tubes having a plurality of injection ports or orifices distributed in the tubes for directing flow of reactant and other gases across the surface of each substrate. The elongated injection tubes are rotatable about an axis in 360 degrees.
IPC 1-7
IPC 8 full level
C23C 16/455 (2006.01); C23C 16/458 (2006.01); C23C 16/52 (2006.01); C23F 1/00 (2006.01)
IPC 8 main group level
H01L (2006.01)
CPC (source: EP US)
C23C 16/45508 (2013.01 - EP US); C23C 16/45578 (2013.01 - EP US); C23C 16/4584 (2013.01 - EP US)
Designated contracting state (EPC)
DE FR GB IT
DOCDB simple family (publication)
WO 2005031803 A2 20050407; WO 2005031803 A3 20061221; WO 2005031803 A9 20050526; EP 1676294 A2 20060705; EP 1676294 A4 20071031; JP 2007515054 A 20070607; TW 200531174 A 20050916; TW I250586 B 20060301; US 2005121145 A1 20050609
DOCDB simple family (application)
US 2004031063 W 20040922; EP 04784778 A 20040922; JP 2006528134 A 20040922; TW 93128909 A 20040923; US 94684904 A 20040921