EP 1681905 A1 20060719 - Method of fabricating semiconductor electric heating film
Title (en)
Method of fabricating semiconductor electric heating film
Title (de)
Verfahren zur Herstellung einer halbleitenden Heizelement -Schicht
Title (fr)
Méthode de fabrication d'un film électrique chauffant à semiconducteur
Publication
Application
Priority
EP 05090007 A 20050117
Abstract (en)
Disclosed is method of fabricating semiconductor heater film which is formed on a substrate with excellent heat resistant and electrical insulation property by depositing atomized particles of coating material essentially formed of powdered metallic (Sn,V) chlorides and silicide mixed with one of Fe, Sb or In compound and solvent such as water, methyl and ethyle alcohols, hydrochloric acid, sulfuric acid, also small amount of non-organic acid is added to intensify the chemical affinity of the coating material.
IPC 8 full level
H05B 3/14 (2006.01); H01C 17/20 (2006.01); H05B 3/16 (2006.01)
CPC (source: EP)
C23C 18/08 (2013.01); C23C 18/1216 (2013.01); C23C 18/1245 (2013.01); C23C 18/1291 (2013.01); C23C 18/1295 (2013.01); H01C 17/06526 (2013.01); H01C 17/0656 (2013.01); H01C 17/20 (2013.01)
Citation (search report)
- [X] US 5725912 A 19980310 - LIN PAN-TIEN [TW]
- [X] EP 0654956 A1 19950524 - LAMP ENTERPRISES CO LTD U [TW]
- [X] US 4889974 A 19891226 - AUDING HANS [DE], et al
- [X] AU 751515 B2 20020815 - EMAIL LTD
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU MC NL PL PT RO SE SI SK TR
DOCDB simple family (publication)
DOCDB simple family (application)
EP 05090007 A 20050117