EP 1682700 A1 20060726 - VOLUME MEASUREMENT APPARATUS AND METHOD
Title (en)
VOLUME MEASUREMENT APPARATUS AND METHOD
Title (de)
VOLUMENMESSVORRICHTUNG UND VERFAHREN
Title (fr)
APPAREIL ET PROCEDE DE MESURE DE VOLUME
Publication
Application
Priority
- US 2004033483 W 20041008
- US 68391703 A 20031010
Abstract (en)
[origin: US2005077182A1] Embodiments of the invention generally provide an electrochemical processing system configured to provide selected amounts of electrolyte composition components for single plating process. The selected amounts of components to be added to an electrolyte composition may be achieved by a volume measurement device using an ultrasonic sensor to measure volume of a vessel.
IPC 8 full level
C25D 21/14 (2006.01); C25D 5/20 (2006.01); C25D 17/00 (2006.01); C25D 17/28 (2006.01); C25D 21/12 (2006.01); G01F 23/28 (2006.01)
CPC (source: EP US)
C25D 7/123 (2013.01 - EP US); C25D 17/001 (2013.01 - EP US); C25D 21/12 (2013.01 - EP US); C25D 21/14 (2013.01 - EP US)
Citation (search report)
See references of WO 2005035836A1
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PL PT RO SE SI SK TR
DOCDB simple family (publication)
US 2005077182 A1 20050414; EP 1682700 A1 20060726; WO 2005035836 A1 20050421; WO 2005035836 B1 20050512
DOCDB simple family (application)
US 68391703 A 20031010; EP 04794753 A 20041008; US 2004033483 W 20041008