EP 1688964 A3 20080813 - Electrostatic deflection system for corpuscular radiation
Title (en)
Electrostatic deflection system for corpuscular radiation
Title (de)
Elektrostatisches Ablenksystem für Korpuskularstrahlung
Title (fr)
Système de déviation électrostatique pour rayonnement corpusculaire
Publication
Application
Priority
DE 102005005801 A 20050204
Abstract (en)
[origin: EP1688964A2] An electrostatic diffraction system for corpuscular radiation for micro- and nano-structure lithography or measurement comprises bar electrodes held axially and symmetrically in an inner hollow carrier (1) through which an electron beam is directed. The carrier comprises between two and four mutually connectible carrier elements (1.1,1.2).
IPC 8 full level
G21K 1/087 (2006.01)
CPC (source: EP US)
G21K 1/087 (2013.01 - EP US)
Citation (search report)
- [XA] EP 0999572 A2 20000510 - ADVANTEST CORP [JP]
- [XA] US 5929452 A 19990727 - YOSHITAKE SHUSUKE [JP], et al
- [A] DE 3138898 A1 19830414 - SIEMENS AG [DE]
- [A] US 3497744 A 19700224 - HIMMELBAUER ERICH EDUARD, et al
- [A] JP H05129193 A 19930525 - FUJITSU LTD, et al
- [A] JP S57206172 A 19821217 - NIPPON TELEGRAPH & TELEPHONE
- [A] JP H02247966 A 19901003 - FUJITSU LTD
- [A] JP S59180943 A 19841015 - HITACHI LTD
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR
Designated extension state (EPC)
AL BA HR MK YU
DOCDB simple family (publication)
EP 1688964 A2 20060809; EP 1688964 A3 20080813; DE 102005005801 A1 20060817; DE 102005005801 B4 20070809; JP 2006216558 A 20060817; US 2006192133 A1 20060831; US 7491946 B2 20090217
DOCDB simple family (application)
EP 06002118 A 20060202; DE 102005005801 A 20050204; JP 2006027127 A 20060203; US 34666606 A 20060203