EP 1691588 A3 20090527 - Apparatus and method for production of extreme ultraviolet (EUV) radiation
Title (en)
Apparatus and method for production of extreme ultraviolet (EUV) radiation
Title (de)
Vorrichtung und Verfahren zur Erzeugung von extrem ultravioletter (EUV-) Strahlung
Title (fr)
Dispositif et procédé pour la génération de rayonnement ultraviolet extrême (EUV)
Publication
Application
Priority
DE 102005007884 A 20050215
Abstract (en)
[origin: EP1691588A2] The device has an injection nozzle (13) of an injection mechanism (12), which is positioned on a discharge region in a discharge chamber. The nozzle provides sequence of single volumes base materials serving the jet production, with a sequence frequency which corresponds to the frequency of the gas discharge. A vapor laser (27) is provided for consecutive vaporization of the single volumes in the discharge region. An independent claim is also included for a method for production of ultraviolet radiation.
IPC 8 full level
H05G 2/00 (2006.01)
CPC (source: EP US)
H05G 2/003 (2013.01 - EP US); H05G 2/005 (2024.08 - EP US)
Citation (search report)
- [A] US 2003183787 A1 20031002 - IKEUCHI MITSURU [JP]
- [A] US 2003068012 A1 20030410 - AHMAD IMTIAZ [DE], et al
- [A] US 3777208 A 19731204 - RYASON P
- [A] US 2002070353 A1 20020613 - RICHARDSON MARTIN [US]
- [A] US 2004105082 A1 20040603 - KOSHELEV KONSTANTIN NIKOLAEVIT [RU], et al
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR
Designated extension state (EPC)
AL BA HR MK YU
DOCDB simple family (publication)
EP 1691588 A2 20060816; EP 1691588 A3 20090527; DE 102005007884 A1 20060824; JP 2006237602 A 20060907; JP 4557904 B2 20101006; US 2006192157 A1 20060831; US 7476884 B2 20090113
DOCDB simple family (application)
EP 06002837 A 20060213; DE 102005007884 A 20050215; JP 2006036422 A 20060214; US 35432406 A 20060214