Global Patent Index - EP 1691588 A3

EP 1691588 A3 20090527 - Apparatus and method for production of extreme ultraviolet (EUV) radiation

Title (en)

Apparatus and method for production of extreme ultraviolet (EUV) radiation

Title (de)

Vorrichtung und Verfahren zur Erzeugung von extrem ultravioletter (EUV-) Strahlung

Title (fr)

Dispositif et procédé pour la génération de rayonnement ultraviolet extrême (EUV)

Publication

EP 1691588 A3 20090527 (DE)

Application

EP 06002837 A 20060213

Priority

DE 102005007884 A 20050215

Abstract (en)

[origin: EP1691588A2] The device has an injection nozzle (13) of an injection mechanism (12), which is positioned on a discharge region in a discharge chamber. The nozzle provides sequence of single volumes base materials serving the jet production, with a sequence frequency which corresponds to the frequency of the gas discharge. A vapor laser (27) is provided for consecutive vaporization of the single volumes in the discharge region. An independent claim is also included for a method for production of ultraviolet radiation.

IPC 8 full level

H05G 2/00 (2006.01)

CPC (source: EP US)

H05G 2/003 (2013.01 - EP US); H05G 2/005 (2013.01 - EP US)

Citation (search report)

Designated contracting state (EPC)

AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR

Designated extension state (EPC)

AL BA HR MK YU

DOCDB simple family (publication)

EP 1691588 A2 20060816; EP 1691588 A3 20090527; DE 102005007884 A1 20060824; JP 2006237602 A 20060907; JP 4557904 B2 20101006; US 2006192157 A1 20060831; US 7476884 B2 20090113

DOCDB simple family (application)

EP 06002837 A 20060213; DE 102005007884 A 20050215; JP 2006036422 A 20060214; US 35432406 A 20060214