EP 1695031 A1 20060830 - MICRO-MACHINED VIBRATING STRUCTURE AND ASSOCIATED MICRO-GYROSCOPE
Title (en)
MICRO-MACHINED VIBRATING STRUCTURE AND ASSOCIATED MICRO-GYROSCOPE
Title (de)
MIKROBEARBEITETE VIBRIERENDE STRUKTUR UND ASSOZIIERTES MIKROGYROSKOP
Title (fr)
STRUCTURE VIBRANTE MICRO-USINEE ET MICROGYROMETRE ASSOCIE
Publication
Application
Priority
- FR 2004003203 W 20041213
- FR 0314973 A 20031219
Abstract (en)
[origin: FR2864226A1] The structure has an anchoring end (5) integrated to a fixed support (6), and a vibrating wall (7) comprising a base (8) and a free end (9). Stationary or progressive waves are generated in the vibrating wall. A naturally uncoupled zone is located between the anchoring end and the free end of the vibrating wall. The anchoring end is constituted by the base of the vibrating wall. An independent claim is also included for a microgyrometer comprising a micro-machined vibrating structure.
IPC 8 full level
B81B 3/00 (2006.01); G01C 19/5691 (2012.01); H03H 9/02 (2006.01); H03H 9/24 (2006.01)
CPC (source: EP US)
G01C 19/5691 (2013.01 - EP US); Y10T 74/12 (2015.01 - EP US)
Citation (search report)
See references of WO 2005061991A1
Citation (examination)
US 4655081 A 19870407 - BURDESS JAMES S [GB]
Designated contracting state (EPC)
DE FR GB IT
DOCDB simple family (publication)
FR 2864226 A1 20050624; FR 2864226 B1 20060609; EP 1695031 A1 20060830; JP 2007514947 A 20070607; US 2007095161 A1 20070503; US 7404325 B2 20080729; WO 2005061991 A1 20050707
DOCDB simple family (application)
FR 0314973 A 20031219; EP 04816376 A 20041213; FR 2004003203 W 20041213; JP 2006544490 A 20041213; US 58234404 A 20041213