EP 1697694 A1 20060906 - OPTICAL MEASURING DEVICE FOR HETERODYN INTERFEROMETRIC SURFACE MEASUREMENTS
Title (en)
OPTICAL MEASURING DEVICE FOR HETERODYN INTERFEROMETRIC SURFACE MEASUREMENTS
Title (de)
OPTISCHE MESSVORRICHTUNG FÜR HETERODYNINTERFEROMETRISCHE OBERFLÄCHENMESSUNGEN
Title (fr)
DISPOSITIF DE MESURE OPTIQUE DESTINE A DES MESURES DE SURFACE HETERODYNINTERFEROMETRIQUES
Publication
Application
Priority
- DE 2004002366 W 20041023
- DE 10360078 A 20031220
Abstract (en)
[origin: WO2005061986A1] The invention relates to an optical measuring device for heteryodyn interferometric surface measurements, comprising a modulation interferometer (4), a measuring arrangement connected thereto and a receiver device wherein the signals contained in the interfering radiation are evaluated. A simple,easy-to-handle construction can be obtained by providing a direction-dependent coupler (3) which injects input radiation into the modulation interferometer (4) and transmits partial beams (4.8, 4.9) reconducted therefrom to the measuring arrangement (6), and by forming a common light path in the modulation interferometer (4) to the rear of the coupler (3), said light path being used to guide the input radiation to a partially reflecting optical element (4.2) for sub-division into at least two partial beams (4.8, 4.9), whereupon a partial beam (4.8) thereof is reflected to the element (4.2) and is reconducted along the common light path and another partial beam (4.9) is reflected to a downstream mirror (4.5) according to the optical path difference (L) and is reconducted to the common light path via the element (4.2).
IPC 8 full level
G01B 9/02 (2006.01); G01B 11/24 (2006.01); G01N 21/45 (2006.01)
CPC (source: EP)
G01B 9/02002 (2013.01); G01B 9/02028 (2013.01); G01B 9/02057 (2013.01); G01B 9/02065 (2013.01); G01B 9/0209 (2013.01); G01N 21/45 (2013.01); G01B 2290/45 (2013.01)
Citation (search report)
See references of WO 2005061986A1
Citation (examination)
DE 3707331 A1 19880915 - ZEISS CARL FA [DE]
Designated contracting state (EPC)
CH DE GB LI
DOCDB simple family (publication)
WO 2005061986 A1 20050707; DE 10360078 A1 20050721; EP 1697694 A1 20060906
DOCDB simple family (application)
DE 2004002366 W 20041023; DE 10360078 A 20031220; EP 04802638 A 20041023