EP 1697797 A2 20060906 - POLARISATON INFLUENCING ARRANGEMENT AND PROJECTION EXPOSURE APPARATUS THEREWITH
Title (en)
POLARISATON INFLUENCING ARRANGEMENT AND PROJECTION EXPOSURE APPARATUS THEREWITH
Title (de)
POLARISATIONSBEEINFLUSSENDE ANORDNUNG UND PROJEKTIONSBELICHTUNGSANLAGE DAMIT
Title (fr)
DISPOSITIF AYANT UNE INFLUENCE SUR LA POLARISATION ET ET DISPOSITIF D'ECLAIRAGE DE PROJECTION MICROLITHOGRAPHIQUE COMPORTANT UN TEL DISPOSITIF
Publication
Application
Priority
- EP 2004012707 W 20041110
- US 72137803 A 20031126
Abstract (en)
[origin: US2004184019A1] A retardation arrangement for converting an input radiation beam, incident from an input side of the retardation arrangement, into an output radiation beam which has over its cross section a spatial distribution of polarization states which can be influenced by the retardation arrangement and differs from the spatial distribution of polarization states of the input radiation, is designed as a reflective retardation arrangement. A useful cross section of the retardation arrangement has a multiplicity of retardation zones of different retardation effect. Such a mirror arrangement having a retardation effect varying as a function of location can be used to compensate undesired fluctuations in the polarization state over the cross section of an input radiation beam and/or to set specific output polarization states, for example in order to set radial or tangential polarization.
IPC 8 full level
G03F 7/20 (2006.01); G02B 5/18 (2006.01); G02B 5/30 (2006.01); G02B 27/28 (2006.01)
CPC (source: EP KR US)
G02B 5/1809 (2013.01 - EP US); G02B 5/30 (2013.01 - KR); G02B 5/3083 (2013.01 - EP US); G02B 27/28 (2013.01 - KR); G02B 27/286 (2013.01 - EP US); G03B 27/28 (2013.01 - KR); G03F 7/20 (2013.01 - KR); G03F 7/70308 (2013.01 - EP US); G03F 7/70566 (2013.01 - EP US)
Citation (search report)
See references of WO 2005059653A2
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LU MC NL PL PT RO SE SI SK TR
DOCDB simple family (publication)
US 2004184019 A1 20040923; US 7053988 B2 20060530; EP 1697797 A2 20060906; KR 20060118517 A 20061123; US 2006152701 A1 20060713; US 7411656 B2 20080812; WO 2005059653 A2 20050630; WO 2005059653 A3 20051020
DOCDB simple family (application)
US 72137803 A 20031126; EP 04797770 A 20041110; EP 2004012707 W 20041110; KR 20067010415 A 20060526; US 33749106 A 20060124