EP 1699107 B1 20170531 - 3 dB coupler
Title (en)
3 dB coupler
Title (de)
3dB-Koppler
Title (fr)
Coupleur 3dB
Publication
Application
Priority
EP 05004860 A 20050305
Abstract (en)
[origin: EP1699107A1] A vacuum plasma generator (1) comprises a mains connection (2) for connection to a voltage supply network; and a mains rectifier (3) that is connected to a first converter (4) that generates an intermediate circuit voltage (5), a first radio frequency (RF) signal generator (6) that generates a first signal of a basic frequency and of a first phase position, a second RF signal generator (7) that generates a second signal of the basic frequency and of a second phase position, and 3 dB coupler (13) that couples the first and the second signal and generates an output signal. An independent claim is also included for a method of treating workpieces in a vacuum chamber, comprising: (A) receiving a mains voltage from a voltage supply network; (B) generating intermediate circuit voltage; (C) generating a first RF signal of a basic frequency, and of a first phase position, from the intermediate circuit voltage; (D) generating a second RF signal of the basic frequency, and of a second phase position, from the intermediate circuit voltage; and (E) coupling the first and the second signal and generating an output signal for the vacuum chamber using a 3 dB coupler.
IPC 8 full level
H01P 5/18 (2006.01)
CPC (source: EP US)
H01P 5/184 (2013.01 - EP US)
Citation (examination)
- EP 0964525 A2 19991215 - LOCKHEED CORP [US]
- EP 0506091 A1 19920930 - KOKUSAI ELECTRIC CO LTD [JP]
- STEVE MAAS: "Designing VHF Lumped-Element Couplers with MW Office", pages 1 - 8, Retrieved from the Internet <URL:https://www.google.nl/url?sa=t&rct=j&q=&esrc=s&source=web&cd=1&ved=0ahUKEwjL8uHhmcvQAhWInRoKHX3CCggQFggaMAA&url=https%3A%2F%2Fawrcorp.com%2Fdownload%2Fkb.aspx%3Ffile%3Dappnotes%2FVHF_Lump_Coupler.pdf&usg=AFQjCNHnzFzZx24iOapTZw5-G1F0faPnwA&sig2=HeiCGu07hgzwonIpBHwmJg&bvm=bv.139782543,d.d2s> [retrieved on 19990101]
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU MC NL PL PT RO SE SI SK TR
DOCDB simple family (publication)
EP 1699107 A1 20060906; EP 1699107 B1 20170531; JP 2006245591 A 20060914; US 2006197629 A1 20060907; US 7477114 B2 20090113
DOCDB simple family (application)
EP 05004860 A 20050305; JP 2006059327 A 20060306; US 36831406 A 20060303