EP 1706883 A1 20061004 - ELECTRONIC APPARATUS WITH A MICROELECTROMECHANICAL SWITCH MADE OD A PIEZOELECTRIC MATERIAL
Title (en)
ELECTRONIC APPARATUS WITH A MICROELECTROMECHANICAL SWITCH MADE OD A PIEZOELECTRIC MATERIAL
Title (de)
ELEKTRONISCHES GERÄT MIT EINEM MIKRO-ELEKTROMECHANISCHEN SCHALTER AUS PIEZOELEKTRISCHEM MATERIAL
Title (fr)
APPAREIL ELECTRONIQUE AVEC UN COMMUTATEUR MICROELECTROMECANIQUE EN MATERIAU PIEZO-ELECTRIQUE
Publication
Application
Priority
- IB 2004052881 W 20041221
- EP 03104894 A 20031222
- EP 04806609 A 20041221
Abstract (en)
[origin: WO2005064634A1] An electronic apparatus contains a micro-electromechanical switch (MEMS) which comprises a piezoelectric element with a piezoelectric layer (12) between a first and a second electrode layers (11, 13), at least one of the electrode layers being structured into separate electrodes (41,42,43;51,52,53) that can be independently controlled.
IPC 8 full level
H01H 57/00 (2006.01); H01L 41/09 (2006.01); H01L 41/257 (2013.01); H01H 1/00 (2006.01)
CPC (source: EP US)
H01G 5/16 (2013.01 - EP US); H01G 5/40 (2013.01 - EP US); H01H 57/00 (2013.01 - EP US); H01H 1/0036 (2013.01 - EP US); H01H 2057/006 (2013.01 - EP US); H10N 30/2041 (2023.02 - EP US)
Citation (search report)
See references of WO 2005064634A1
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU MC NL PL PT RO SE SI SK TR
DOCDB simple family (publication)
WO 2005064634 A1 20050714; CN 1898762 A 20070117; EP 1706883 A1 20061004; JP 2007522609 A 20070809; US 2009211884 A1 20090827; US 7952259 B2 20110531
DOCDB simple family (application)
IB 2004052881 W 20041221; CN 200480038438 A 20041221; EP 04806609 A 20041221; JP 2006546461 A 20041221; US 58404404 A 20041221