EP 1718135 A1 20061102 - Plasma generator
Title (en)
Plasma generator
Title (de)
Plasmaerzeuger
Title (fr)
Générateur de plasma
Publication
Application
Priority
EP 05425273 A 20050429
Abstract (en)
A plasma generator (1) comprising a main duct (10) for a gas to be ionised (20), a waveguide (50) for electromagnetic radiation (30), and at least one supporting element (60) on which the waveguide (50) and main duct (10) are mounted; a first portion (51) of the waveguide (50) extends transversely of the supporting element (60) in a first region (61a) facing a first surface (61) of the supporting element. A second portion (52) of the waveguide (50) intersects the duct (10) for interaction between the gas (20) and the radiation (30) and for plasma generation (40); the duct (10) expends transversely of the supporting element (60) in the first region (61a).
IPC 8 full level
H05H 1/46 (2006.01); H01J 37/32 (2006.01)
CPC (source: EP)
H05H 1/46 (2013.01)
Citation (search report)
- [A] US 2002050323 A1 20020502 - MOISAN MICHEL [CA], et al
- [A] DE 4217900 A1 19931202 - LEYBOLD AG [DE]
- [A] US 5714009 A 19980203 - BOLING NORMAN L [US]
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU MC NL PL PT RO SE SI SK TR
Designated extension state (EPC)
AL BA HR LV MK YU
DOCDB simple family (publication)
EP 1718135 A1 20061102; EP 1718135 B1 20080102; AT E383063 T1 20080115; DE 602005004124 D1 20080214; DE 602005004124 T2 20081224
DOCDB simple family (application)
EP 05425273 A 20050429; AT 05425273 T 20050429; DE 602005004124 T 20050429