EP 1721217 A2 20061115 - SYSTEM FOR REDUCING THE COHERENCE OF LASER RADIATION
Title (en)
SYSTEM FOR REDUCING THE COHERENCE OF LASER RADIATION
Title (de)
SYSTEM ZUR REDUZIERUNG DER KOHÄRENZ EINER LASERSTRAHLUNG
Title (fr)
SYSTEME PERMETTANT DE REDUIRE LA COHERENCE D'UN RAYONNEMENT LASER
Publication
Application
Priority
- EP 2005001797 W 20050222
- DE 102004009239 A 20040226
Abstract (en)
[origin: WO2005083511A2] The invention relates to a system for reducing the coherence of a wave front-emitting laser radiation (10b), especially for a projection lens for use in semiconductor lithography, wherein a first partial beam (10a) of a laser beam (10) incident on a surface (11) of a resonator body (9) is partially reflected. A second partial beam (10b) penetrates the resonator body (9) and emerges from the resonator body (9) at least approximately in the area of entry after a plurality of total internal reflections. The two partial beams (10a and 10b) are then passed on jointly to an illumination plane. The resonator body (9) is adapted, in addition to splitting the laser beam into partial beams (10a, 10b), to modulate the wave fronts of at least one partial beam (10b) during a laser pulse. The partial beams (10a, 10b) reflected on the resonator body (9) and penetrating the resonator body are superimposed downstream of the resonator body (9). The resonator body (9, 9') is provided with a phase plate (12) having different local phase distribution.
IPC 8 full level
G03F 7/20 (2006.01)
CPC (source: EP KR US)
G03F 7/20 (2013.01 - KR); G03F 7/70058 (2013.01 - EP US); G03F 7/70583 (2013.01 - EP US)
Citation (search report)
See references of WO 2005083511A2
Designated contracting state (EPC)
DE NL
DOCDB simple family (publication)
WO 2005083511 A2 20050909; WO 2005083511 A3 20051201; EP 1721217 A2 20061115; JP 2007528595 A 20071011; JP 4769788 B2 20110907; KR 101109354 B1 20120131; KR 20060129502 A 20061215; US 2007206381 A1 20070906; US 7593095 B2 20090922
DOCDB simple family (application)
EP 2005001797 W 20050222; EP 05707555 A 20050222; JP 2007500124 A 20050222; KR 20067019720 A 20050222; US 59053705 A 20050222