EP 1721227 A2 20061115 - FLOW RESTRICTOR
Title (en)
FLOW RESTRICTOR
Title (de)
DROSSELKÖRPER
Title (fr)
LIMITEUR DE DEBIT
Publication
Application
Priority
- US 2005005653 W 20050224
- US 54810904 P 20040227
Abstract (en)
[origin: WO2005086643A2] A flow restrictor with a first disk having at least one inlet and at least one outlet and a flow path and a second disk having no flow path. The first disk and the second disk being stacked together. A mass flow controller comprising with an input, an output, a flow path, a pressure transducer and the above flow restrictor.
IPC 8 full level
G05D 7/06 (2006.01); F16K 47/08 (2006.01)
CPC (source: EP KR)
F16K 47/08 (2013.01 - EP); G05D 7/06 (2013.01 - KR)
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU MC NL PL PT RO SE SI SK TR
Designated extension state (EPC)
AL BA HR LV MK YU
DOCDB simple family (publication)
WO 2005086643 A2 20050922; WO 2005086643 A3 20060427; CN 102354228 A 20120215; CN 102354228 B 20140730; CN 1922561 A 20070228; EP 1721227 A2 20061115; EP 1721227 A4 20100203; EP 2365412 A1 20110914; EP 2365412 B1 20121003; JP 2007531931 A 20071108; JP 2011257004 A 20111222; JP 5295318 B2 20130918; KR 20060134085 A 20061227
DOCDB simple family (application)
US 2005005653 W 20050224; CN 200580006003 A 20050224; CN 201110170487 A 20050224; EP 05723513 A 20050224; EP 11164165 A 20050224; JP 2007500931 A 20050224; JP 2011139507 A 20110623; KR 20067017283 A 20060825