EP 1722901 B1 20090422 - METHOD FOR PLASMA CLEANING OF A COMPONENT
Title (en)
METHOD FOR PLASMA CLEANING OF A COMPONENT
Title (de)
VERFAHREN ZUR PLASMAREINIGUNG EINES BAUTEILS
Title (fr)
PROCEDE DE NETTOYAGE AU PLASMA D'UN COMPOSANT
Publication
Application
Priority
- EP 2005001301 W 20050209
- EP 04004892 A 20040302
- EP 05701389 A 20050209
Abstract (en)
[origin: EP1570921A1] The method involves observing specific parameters of the plasma whereby a crack (4) which emanates from the surface (22)of the component is cleaned through the plasma (7) based on the variation of at least one of the parameters. The component part can be arranged in a chamber (13) with an electrode (10) for initiating a plasma whereby a constant pressure prevails and a distance of the electrode from the surface of the component is varied in dependence on the depth of the crack.
IPC 8 full level
CPC (source: EP US)
Designated contracting state (EPC)
CH DE GB IT LI
DOCDB simple family (publication)
EP 1570921 A1 20050907; CN 100586586 C 20100203; CN 1946489 A 20070411; DE 502005007139 D1 20090604; EP 1722901 A1 20061122; EP 1722901 B1 20090422; US 2007215174 A1 20070920; US 7513955 B2 20090407; WO 2005084830 A1 20050915
DOCDB simple family (application)
EP 04004892 A 20040302; CN 200580006606 A 20050209; DE 502005007139 T 20050209; EP 05701389 A 20050209; EP 2005001301 W 20050209; US 59151205 A 20050209