EP 1728045 A1 20061206 - LOW-COHERENCE INTERFEROMETRIC METHOD AND APPLIANCE FOR SCANNING SURFACES IN A LIGHT-OPTICAL MANNER
Title (en)
LOW-COHERENCE INTERFEROMETRIC METHOD AND APPLIANCE FOR SCANNING SURFACES IN A LIGHT-OPTICAL MANNER
Title (de)
NIEDERKOHÄRENZ-INTERFEROMETRISCHES VERFAHREN UND GERÄT ZUR LICHTOPTISCHEN ABTASTUNG VON OBERFLÄCHEN
Title (fr)
PROCEDE INTERFEROMETRIQUE A FAIBLE COHERENCE, ET APPAREIL DE BALAYAGE OPTIQUE DE SURFACES
Publication
Application
Priority
- DE 2005000417 W 20050310
- DE 102004012426 A 20040313
Abstract (en)
[origin: WO2005088241A1] The invention relates to a low-coherence interferometric appliance for scanning a surface (19) of an object in a light-optical manner, especially a concave surface (19), for example a borehole, using a short-coherence interferometer comprising a short-coherence measuring light source (30), a beam splitter (13) for splitting the light emitted by said source into a measuring light beam (23) and a reference light beam (22), a reference reflector (16), a measuring optical element (17), and a detector (35), to which the reflected measuring light beam (23) and the reference light beam (22) are supplied in order to detect a low-coherence interference signal. The measuring light beam (23) is focussed in a focal region (27) extending in a scanning direction, by a measuring optical element (17) having a maximum digital aperture of 0.3, a control and evaluation unit (6) varying a scanning position by a reference point inside said focal region, and registering the correspondence between the scanning position and the surface (19), in order to obtain information about the distance between the reference point and the surface (19) of the object. Location information about a light-reflecting position of the surface (19) is determined from the distance information and the position of the reference point.
IPC 8 full level
G01B 9/02 (2006.01); A61B 5/00 (2006.01); G01B 11/24 (2006.01); G01N 21/47 (2006.01)
CPC (source: EP)
G01B 9/0203 (2013.01); G01B 9/0205 (2013.01); G01B 9/02063 (2013.01); G01B 9/0209 (2013.01); G01B 11/2441 (2013.01)
Citation (search report)
See references of WO 2005088241A1
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU MC NL PL PT RO SE SI SK TR
DOCDB simple family (publication)
WO 2005088241 A1 20050922; WO 2005088241 A8 20061019; DE 102004012426 A1 20050929; EP 1728045 A1 20061206
DOCDB simple family (application)
DE 2005000417 W 20050310; DE 102004012426 A 20040313; EP 05715081 A 20050310