EP 1732071 A1 20061213 - Lens positioning method, cutting method, positioning method and cutting apparatus
Title (en)
Lens positioning method, cutting method, positioning method and cutting apparatus
Title (de)
Linsenpositionierungsverfahren, Schneidverfahren, Positionierungsverfahren und Schneidgerät
Title (fr)
Procédé de positionnement de l'objectif, procédé de gravure, procédé de positionnement et appareil de gravure
Publication
Application
Priority
JP 2005169890 A 20050609
Abstract (en)
A lens positioning method is provided. While vibrating an objective lens in the direction parallel with an optical axis, either the objective lens or a master disc in which a resist material has been formed as a film onto a substrate is moved, thereby changing a distance between the objective lens and a surface of the master disc. A return laser beam transmitted through the objective lens and reflected by the master disc surface is detected by a photodetector. When the master disc is located near a focal point of the objective lens, the return laser beam is detected by the photodetector. When the return laser beam is detected, the movement of either the objective lens or the master disc is stopped.
IPC 8 full level
G11B 7/085 (2006.01)
CPC (source: EP KR US)
G11B 7/085 (2013.01 - KR); G11B 7/26 (2013.01 - KR); G11B 7/261 (2013.01 - EP US); G11B 7/08511 (2013.01 - EP US)
Citation (search report)
- [X] US 5978331 A 19991102 - CESHKOVSKY LUDWIG [US]
- [X] US 2002051410 A1 20020502 - OKAJIMA HIROAKI [JP]
- [X] US 2005058032 A1 20050317 - KAWABE TAKAYUKI [JP]
- [X] EP 0759611 A2 19970226 - TOSHIBA KK [JP]
- [A] US 6400663 B1 20020604 - OKADA YUU [JP], et al
- [A] US 2003067850 A1 20030410 - TAKAHASHI KAZUO [JP], et al
Designated contracting state (EPC)
AT DE
Designated extension state (EPC)
AL BA HR MK YU
DOCDB simple family (publication)
EP 1732071 A1 20061213; CN 1877456 A 20061213; KR 20060128686 A 20061214; TW 200705440 A 20070201; US 2006285463 A1 20061221
DOCDB simple family (application)
EP 06011546 A 20060602; CN 200610099850 A 20060609; KR 20060051205 A 20060608; TW 95119883 A 20060605; US 42248806 A 20060606