Global Patent Index - EP 1735663 A1

EP 1735663 A1 20061227 - LITHOGRAPHIC METHOD PRODUCTS OBTAINED AND USE OF SAID METHOD

Title (en)

LITHOGRAPHIC METHOD PRODUCTS OBTAINED AND USE OF SAID METHOD

Title (de)

LITHOGRAPHIE-VERFAHREN, DURCH DIESES VERFAHREN ERHÄLTLICHE PRODUKTE UND VERWENDUNG DIESES VERFAHRENS

Title (fr)

PROCEDE DE LITHOGRAPHIE, PRODUITS OBTENUS ET UTILISATION DUDIT PROCEDE

Publication

EP 1735663 A1 20061227 (FR)

Application

EP 04742463 A 20040408

Priority

FR 2004000876 W 20040408

Abstract (en)

[origin: WO2005109097A1] The invention relates to a lithographic method, products obtained by use of said method and use of said method, in particular, in the production of micro- or nano-metric products or objects. The method is characterised in essentially comprising the steps of deposition of a film of an organometallic solution of a substrate, containing at least one metal ion as precursor(s) for marking said substrate, local exposure, according to the required pattern, of the obtained film, by means of at least one focussed energetic beam, with an energy density sufficient to at least locally dry said film, dissolution of the non-exposed zone, the at least dried zones remaining on said substrate, optionally subjecting the obtained product to a thermal treatment and, where necessary, repetition of certain steps, with optional change to the organometallic solution, until the required final product is obtained.

IPC 8 full level

G03F 7/004 (2006.01); H01L 21/288 (2006.01); H01L 21/768 (2006.01); H05K 3/10 (2006.01); H05K 1/03 (2006.01); H05K 3/02 (2006.01)

CPC (source: EP)

G03F 7/0042 (2013.01); G03F 7/0043 (2013.01); G03F 7/0047 (2013.01); H01L 21/288 (2013.01); H01L 21/76838 (2013.01); H05K 3/105 (2013.01); H05K 1/0306 (2013.01); H05K 3/02 (2013.01); H05K 2203/107 (2013.01); H05K 2203/121 (2013.01)

Citation (search report)

See references of WO 2005109097A1

Designated contracting state (EPC)

AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PL PT RO SE SI SK TR

DOCDB simple family (publication)

WO 2005109097 A1 20051117; EP 1735663 A1 20061227; US 2007210393 A1 20070913

DOCDB simple family (application)

FR 2004000876 W 20040408; EP 04742463 A 20040408; US 54777404 A 20040408