EP 1737762 A2 20070103 - WAFER CONTAINER WITH SEALABLE DOOR
Title (en)
WAFER CONTAINER WITH SEALABLE DOOR
Title (de)
WAFERBEHÄLTER MIT ABDICHTBARER TÜR
Title (fr)
CONTENEUR DE TRANCHE A PORTE SUSCEPTIBLE D'ETRE ETANCHEIFIEE
Publication
Application
Priority
- US 2005013166 W 20050418
- US 56352904 P 20040418
- US 10834905 A 20050417
Abstract (en)
[origin: WO2005102871A2] A wafer container including an enclosure portion with a door frame defining an opening for insertion and removal of wafers and a door fittable in the door frame to seal the enclosure portion. A continuous elastomeric seal extends around the door inward of the periphery. The seal is positioned on a sealing surface proximate the perimeter of the door and may be partially inset in a radial groove in the door. In cross-section, the elastomeric seal has an inset portion and a sealing head coupled by a bridging portion. The sealing head has a foot portion projecting from the bridging portion toward the sealing surface of the door, and a head portion extending in a direction generally opposite the foot relative to the bridging portion. The door frame has a seal engaging structure so that when the door is seated in the door frame, the bridging portion of the elastomeric seal contacts the seal engaging structure displacing the bridging portion axially toward the sealing surface and causing the head of the sealing head to rotate radially and contact the seal engaging structure. The displacement action also affirmatively sets the foot of the sealing head in contact with the sealing surface of the door.
IPC 8 full level
B65D 53/02 (2006.01); B65D 43/04 (2006.01); B65D 85/00 (2006.01); B65D 85/30 (2006.01); H01L 21/673 (2006.01); H01L 21/00 (2006.01)
CPC (source: EP KR)
B65D 85/30 (2013.01 - KR); B65D 85/38 (2013.01 - KR); H01L 21/673 (2013.01 - KR); H01L 21/67376 (2013.01 - EP); H01L 21/67126 (2013.01 - EP)
Citation (search report)
See references of WO 2005102871A2
Designated contracting state (EPC)
DE FR GB IT NL
Designated extension state (EPC)
AL BA HR LV MK YU
DOCDB simple family (publication)
WO 2005102871 A2 20051103; WO 2005102871 A3 20081002; CN 101432202 A 20090513; CN 101432202 B 20111207; EP 1737762 A2 20070103; JP 2008500238 A 20080110; JP 4896007 B2 20120314; KR 20070011518 A 20070124
DOCDB simple family (application)
US 2005013166 W 20050418; CN 200580019833 A 20050418; EP 05736957 A 20050418; JP 2007508628 A 20050418; KR 20067024107 A 20061117