EP 1738161 B1 20150708 - METHOD FOR MINIMIZING CROSS SENSITIVITY IN FET-BASED GAS SENSORS
Title (en)
METHOD FOR MINIMIZING CROSS SENSITIVITY IN FET-BASED GAS SENSORS
Title (de)
VERFAHREN ZUR MINIMIERUNG VON QUEREMPFINDLICHKEITEN BEI FET-BASIERTEN GASSENSOREN
Title (fr)
PROCEDE POUR MINIMISER DES SENSIBILITES TRANSVERSALES DANS DES CAPTEURS DE GAZ A BASE DE TRANSISTORS A EFFET DE CHAMP
Publication
Application
Priority
- EP 2005004318 W 20050422
- DE 102004019604 A 20040422
Abstract (en)
[origin: WO2005103668A1] Disclosed is a method for measuring gases in FET-based gas sensors whose sensor signal is generated by modifying the work function on a sensitive layer, the change in capacity of the sensitive layer being evaluated in addition to reading out the modification of the work function.
IPC 8 full level
G01N 27/22 (2006.01); G01N 27/414 (2006.01); G01N 33/00 (2006.01)
CPC (source: EP US)
G01N 27/4143 (2013.01 - EP US); G01N 33/006 (2013.01 - EP US)
Designated contracting state (EPC)
CH DE FR GB IT LI NL
DOCDB simple family (publication)
WO 2005103668 A1 20051103; CN 100588964 C 20100210; CN 1973201 A 20070530; DE 102004019604 A1 20051117; EP 1738161 A1 20070103; EP 1738161 B1 20150708; JP 2007533988 A 20071122; US 2008016949 A1 20080124; US 7946153 B2 20110524
DOCDB simple family (application)
EP 2005004318 W 20050422; CN 200580012498 A 20050422; DE 102004019604 A 20040422; EP 05743344 A 20050422; JP 2007508853 A 20050422; US 58717306 A 20061213