EP 1738395 A1 20070103 - METHOD FOR DEPOSITING CARBIDE COATINGS OF HIGH-FUSION METALS
Title (en)
METHOD FOR DEPOSITING CARBIDE COATINGS OF HIGH-FUSION METALS
Title (de)
VERFAHREN ZUM ABSCHEIDEN VON KARBIDSCHICHTEN HOCHSCHMELZENDER METALLE
Title (fr)
PROCEDE POUR DEPOSER DES COUCHES DE CARBURE DE METAUX A POINT DE FUSION ELEVE
Publication
Application
Priority
- EP 2005001851 W 20050223
- DE 102004019169 A 20040420
Abstract (en)
[origin: WO2005109466A1] The invention relates to a method for depositing layers of carbide of at least one high-fusion metal (3) on at least one object (8) using high-speed electron beam evaporation in a vacuum chamber (1). According to the invention: an atmosphere that contains carbon is created in said vacuum chamber (1) by the influx of a reactive gas; the high-fusion metal (3) is evaporated using an electron beam (5); the deposition is supported by a plasma, the latter being generated on the surface of the high-fusion metal (3) that is to be evaporated by means of a diffuse arc discharge; and the coating rate is at least 20 nm/s and the object temperature is maintained at between 50 DEG C and 500 DEG C during the deposition process.
IPC 8 full level
H01J 37/32 (2006.01); C23C 14/00 (2006.01); C23C 14/06 (2006.01); C23C 14/32 (2006.01)
CPC (source: EP KR)
C23C 14/0021 (2013.01 - EP KR); C23C 14/0635 (2013.01 - EP KR); C23C 14/28 (2013.01 - KR); C23C 14/32 (2013.01 - EP KR); C23C 14/325 (2013.01 - KR); H01J 37/3233 (2013.01 - EP KR)
Citation (search report)
See references of WO 2005109466A1
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU MC NL PL PT RO SE SI SK TR
DOCDB simple family (publication)
WO 2005109466 A1 20051117; CN 1922708 A 20070228; DE 102004019169 A1 20051117; EP 1738395 A1 20070103; JP 2007533853 A 20071122; JP 4868534 B2 20120201; KR 20060134994 A 20061228
DOCDB simple family (application)
EP 2005001851 W 20050223; CN 200580005303 A 20050223; DE 102004019169 A 20040420; EP 05707580 A 20050223; JP 2007508741 A 20050223; KR 20067019342 A 20060920