EP 1743047 A1 20070117 - SUPPORT PLATE FOR SPUTTER TARGETS
Title (en)
SUPPORT PLATE FOR SPUTTER TARGETS
Title (de)
TRÄGERPLATTE FÜR SPUTTERTARGETS
Title (fr)
PLAQUE DE SUPPORT POUR CIBLES DE PULVERISATION CATHODIQUE
Publication
Application
Priority
- EP 2005003757 W 20050409
- DE 102004020404 A 20040423
Abstract (en)
[origin: WO2005106068A1] Disclosed is a support plate for sputter targets. Said support plate is made of a composite material containing 5 to 99 percent by weight of at least one refractory metal from the group comprising Mo, W, Re, and Ta as well as 95 to 1 percent by weight of at least one additional metallic component from the group comprising Cu, Ag, and Au. Also disclosed are a method for producing said support plate and a unit encompassing the inventive support plate and a sputter target.
IPC 8 full level
C23C 14/34 (2006.01)
CPC (source: EP US)
C22C 27/00 (2013.01 - EP US); C23C 14/3407 (2013.01 - EP US)
Citation (search report)
See references of WO 2005106068A1
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU MC NL PL PT RO SE SI SK TR
DOCDB simple family (publication)
WO 2005106068 A1 20051110; DE 102004020404 A1 20051117; DE 102004020404 B4 20070606; EP 1743047 A1 20070117; TW 200604362 A 20060201; US 2007205102 A1 20070906
DOCDB simple family (application)
EP 2005003757 W 20050409; DE 102004020404 A 20040423; EP 05731108 A 20050409; TW 94112794 A 20050422; US 56821805 A 20050409