EP 1754240 A2 20070221 - APPARATUS FOR GENERATING AND EMITTING XUV RADIATION
Title (en)
APPARATUS FOR GENERATING AND EMITTING XUV RADIATION
Title (de)
EINRICHTUNG ZUR ERZEUGUNG UND EMISSION VON XUV-STRAHLUNG
Title (fr)
DISPOSITIF POUR PRODUIRE ET EMETTRE UN RAYONNEMENT XUV
Publication
Application
Priority
- EP 2005004843 W 20050504
- DE 102004025997 A 20040527
Abstract (en)
[origin: WO2005119729A2] Disclosed is an apparatus (2) for generating and emitting XUV radiation. Said apparatus (2) comprises a target (4) which emits XUV radiation when hit by electrically charged particles. Said target (4) encompasses a base (18) that is provided at least in part with a first layer (2Q) containing a material which emits XUV radiation when hit by electrically charged particles. According to the invention, at least one second layer (22) containing a highly electrically conductive material is provided in addition to the first layer (20).
IPC 8 full level
H01J 35/00 (2006.01); G03F 7/20 (2006.01); H01J 35/08 (2006.01)
CPC (source: EP US)
G03F 7/70008 (2013.01 - EP US); H01J 35/12 (2013.01 - EP US); H01J 2235/081 (2013.01 - EP US); H01J 2235/088 (2013.01 - EP US)
Citation (search report)
See references of WO 2005119729A2
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU MC NL PL PT RO SE SI SK TR
Designated extension state (EPC)
AL BA HR LV MK YU
DOCDB simple family (publication)
WO 2005119729 A2 20051215; WO 2005119729 A3 20061207; CN 1981361 A 20070613; DE 102004025997 A1 20051222; EP 1754240 A2 20070221; JP 2008500686 A 20080110; US 2007108396 A1 20070517
DOCDB simple family (application)
EP 2005004843 W 20050504; CN 200580016935 A 20050504; DE 102004025997 A 20040527; EP 05774756 A 20050504; JP 2007513730 A 20050504; US 60438606 A 20061127