EP 1756645 A1 20070228 - APPARATUS AND METHOD FOR INSPECTING MICROSTRUCTURES IN REFLECTED OR TRANSMITTED INFRARED LIGHT
Title (en)
APPARATUS AND METHOD FOR INSPECTING MICROSTRUCTURES IN REFLECTED OR TRANSMITTED INFRARED LIGHT
Title (de)
VORRICHTUNG UND VERFAHREN ZUR OPTISCHEN AUF- UND/ODER DURCHLICHTINSPEKTION VON MIKROSTRUKTUREN IM IR
Title (fr)
DISPOSITIF ET PROCEDE D'INSPECTION OPTIQUE EN LUMIERE REFLECHIE ET/OU EN LUMIERE TRANSMISE DE MICROSTRUCTURES EN IR
Publication
Application
Priority
- EP 2005052351 W 20050523
- DE 102004029212 A 20040616
Abstract (en)
[origin: WO2005124422A1] Previously used examination devices and methods mostly operate with reflected visible or UV light to analyze microstructured samples of a wafer (38), for example. The aim of the invention is to increase the possible uses of said devices, i.e. particularly in order to represent structural details, e.g. of wafers that are structured on both sides, which are not visible in VIS or UV because coatings or intermediate materials are not transparent. Said aim is achieved by using IR light as reflected light while creating transillumination (52) which significantly improves contrast in the IR image, among other things, thus allowing the sample to be simultaneously represented in reflected or transmitted IR light and in reflected visible light.
IPC 8 full level
G02B 21/08 (2006.01); G01N 21/59 (2006.01); G01N 21/95 (2006.01); G01N 21/35 (2006.01)
CPC (source: EP US)
G01N 21/59 (2013.01 - EP US); G01N 21/9501 (2013.01 - EP US); G01N 21/9505 (2013.01 - EP US); G02B 21/088 (2013.01 - EP US)
Citation (search report)
See references of WO 2005124422A1
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU MC NL PL PT RO SE SI SK TR
DOCDB simple family (publication)
WO 2005124422 A1 20051229; CN 101019061 A 20070815; DE 102004029212 A1 20060112; DE 102004029212 B4 20060713; EP 1756645 A1 20070228; JP 2008502929 A 20080131; US 2007247618 A1 20071025; US 8154718 B2 20120410
DOCDB simple family (application)
EP 2005052351 W 20050523; CN 200580017989 A 20050523; DE 102004029212 A 20040616; EP 05745043 A 20050523; JP 2007515921 A 20050523; US 56894905 A 20050523