EP 1756851 A1 20070228 - MEDIA INJECTOR
Title (en)
MEDIA INJECTOR
Title (de)
MEDIENINJEKTOR
Title (fr)
INJECTEUR DE SUBSTANCE
Publication
Application
Priority
- EP 2005005949 W 20050602
- DE 102004029466 A 20040618
Abstract (en)
[origin: WO2005124819A1] The invention relates to a media injector for transporting a particularly fluid medium into a processing chamber, preferably consisting of a supply device and at least one gap acting as a transport opening for the medium, wherein said gap comprises at least two gap defining surfaces with a gap arranged therebetween. According to the invention, at least one gap defining surface is defined by at least one part of at least one front surface of a first tubular element.
IPC 8 full level
H01J 37/32 (2006.01); C23C 14/34 (2006.01)
CPC (source: EP US)
C23C 14/34 (2013.01 - EP US); H01J 37/3244 (2013.01 - EP US); H01J 37/34 (2013.01 - EP US)
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU MC NL PL PT RO SE SI SK TR
DOCDB simple family (publication)
WO 2005124819 A1 20051229; DE 102004029466 A1 20060105; EP 1756851 A1 20070228; JP 2008503036 A 20080131; JP 5408874 B2 20140205; TW 200614879 A 20060501; TW I296486 B 20080501; US 2008264784 A1 20081030
DOCDB simple family (application)
EP 2005005949 W 20050602; DE 102004029466 A 20040618; EP 05746431 A 20050602; JP 2007515815 A 20050602; TW 94119154 A 20050610; US 62852505 A 20050602